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Purged vacuum chuck with proximity pins

  • US 20060130767A1
  • Filed: 04/20/2005
  • Published: 06/22/2006
  • Est. Priority Date: 12/22/2004
  • Status: Abandoned Application
First Claim
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1. A substrate support structure, the structure comprising:

  • a substrate support comprising a first surface and a second surface opposite the first surface;

    a plurality of proximity pins projecting to a first height above the first surface, the first height being less than 100 μ

    m;

    a plurality of purge ports passing from the second surface to the first surface; and

    a plurality of vacuum ports passing from the second surface to the first surface.

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