Semiconductor device and manufacturing method thereof
First Claim
1. A semiconductor device comprising:
- a semiconductor substrate;
an element part that is part of the substrate and comprises a plurality of trench-type transistors, each of the transistors comprising a vertical cannel disposed between a source region formed in a surface of the substrate and a drain region that is disposed below the source region in the substrate;
an element peripheral part that is part of the substrate and surrounds the element part;
a peripheral impurity region that is disposed in the element peripheral part and has a same general conductivity type as the channel; and
an electrode that is disposed on the peripheral impurity region and is electrically connected to the source regions.
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Abstract
In the present invention, an npn junction or a pin junction is formed in an element peripheral part surrounding an element part. In addition, the same potential as that of a source electrode in the element part is applied, and a breakdown voltage of the element peripheral part is set to be always lower than that of the element part. Alternatively, resistance of the element peripheral part is lowered. Thus, breakdown always occurs in the element peripheral part, and the breakdown voltage becomes stable. Moreover, damage caused by breakdown can be prevented by eliminating occurrence of breakdown in a fragile gate oxide film. Furthermore, since the resistance is lowered, electrostatic breakdown strength is improved.
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Citations
22 Claims
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1. A semiconductor device comprising:
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a semiconductor substrate;
an element part that is part of the substrate and comprises a plurality of trench-type transistors, each of the transistors comprising a vertical cannel disposed between a source region formed in a surface of the substrate and a drain region that is disposed below the source region in the substrate;
an element peripheral part that is part of the substrate and surrounds the element part;
a peripheral impurity region that is disposed in the element peripheral part and has a same general conductivity type as the channel; and
an electrode that is disposed on the peripheral impurity region and is electrically connected to the source regions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of manufacturing a semiconductor device, comprising:
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providing a semiconductor substrate of a first general conductivity type;
defining an element part of the substrate in which a plurality of transistors are formed;
forming an impurity region of a second general conductivity type in the substrate around the element part; and
forming a peripheral electrode that is disposed on the impurity region and connected to electrodes of the transistors. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification