Assembly with a detachable member

• US 20060132153A1
• Filed: 12/22/2004
• Published: 06/22/2006
• Est. Priority Date: 12/22/2004
• Status: Abandoned Application

• Current Assignee: FormFactor Incorporated
• Original Assignee: FormFactor Incorporated
• Inventors: Gritters, John K.
• Application Number:
  US11/021,412
• Publication Number:
  US 20060132153A1
• Time in Patent Office: Days
• US Class Current: 324/756.30
• CPC Class Codes: G01R 1/07342 the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Abstract

A structure is fabricated in a generally two-dimensional orientation. The structure includes a detachable member or members. The structure is assembled into a three-dimensional orientation. The detachable member or members are attached to another object and released from the structure.

Claims

1. An assembly comprising:

a base;

a first member rotatably coupled to the base; and

a detachable member releasably coupled to the first member, wherein the detachable member is configured to be coupled to a device.

2. The assembly of claim 1, wherein the base is a silicon substrate.

3. The assembly of claim 1, wherein the base is a silicon wafer.

4. The assembly of claim 1, wherein the first member may rotate away from the base.

5. The assembly of claim 1 further comprising a first hinge coupled to the base, and wherein the first hinge rotatably couples the first member to the base.

6. The assembly of claim 5 wherein the first hinge comprises multiple polysilicon layers.

7. The assembly of claim 5, wherein the first member comprises a hinge recess configured to interact with the first hinge to allow for rotational movement of the first member.

8. The assembly of claim 5, wherein the first hinge and the first member are fabricated using photolithography techniques.

9. The assembly of claim 5 further comprising a second hinge and a second member, wherein the second member is rotatably coupled to the second hinge.

10. The assembly of claim 9, wherein application of a single force to the first member causes rotation of the first member about the first hinge and rotation of the second member about the second hinge erecting the assembly into an erected configuration.

11. The assembly of claim 1, wherein the assembly further includes a support member, and wherein the support member and first member are interconnected such that when the first member is rotated away from the base, the support member also rotates away from the base.

12. The assembly of claim 11, wherein application of a single force to the first member causes rotation of the first member and rotation of the support member erecting the assembly into an erected configuration.

13. The assembly of claim 1, wherein the assembly further includes a support member, and wherein when the first member is rotated away from the base at a particular angle, the support member locks the first member at the particular angle.

14. The assembly of claim 1, wherein the detachable member is coupled to the first member such that it rises above the first member when the assembly is erected.

15. The assembly of claim 1, wherein the detachable member is a probe configured for use with a probe card.

16. The assembly of claim 15, wherein the probe includes a beam and a tip.

17. The assembly of claim 1, wherein the detachable member is a tip for a probe.

18. The assembly of claim 1, wherein the detachable member is offset from the first member to which it is coupled.

19. The assembly of claim 1 further comprising a plurality of the detachable members, each releasably coupled to the first member.

20. The assembly of claim 1, wherein the device comprises the base, and the detachable member is configured to be coupled to the device after the first member is rotated into an erected position.

21. The assembly of claim 1, wherein the device is independent of the assembly.