Lithographic apparatus, device manufacturing method, and device manufactured thereby

• US 20060132735A1
• Filed: 12/22/2004
• Published: 06/22/2006
• Est. Priority Date: 12/22/2004
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Lof, Joeri, Luttikhuis, Bernardus Antonius Johannes, Spit, Peter, Fluit, Jeroen
• Granted Patent: US 7,375,795 B2
• Time in Patent Office: Days
• US Class Current: 355/53
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70791 Large workpieces, e.g. glass substrates for flat panel displays or solar panels

Abstract

Substrate processing apparatus includes a lithographic apparatus which comprises an illumination system for supplying a projection beam of radiation, an array of individually controllable elements serving to impart the projection beam with a pattern in its cross-section, and a projection system for projecting the patterned beam onto a target portion of a substrate. The processing apparatus also includes a substrate supply arranged to output at least one unbroken length of substrate, and a substrate conveying system arranged to convey each outputted unbroken length of substrate from the substrate supply and past the projection system such that the projection system is able to project the patterned beam onto a series of target portions along each unbroken length of substrate. In certain embodiments, long lengths of substrate are supplied from a roll, but alternatively a series of separate sheets can be supplied.

Claims

1. A substrate processing apparatus comprising:

a lithographic apparatus, the lithographic apparatus including;

an illumination system for supplying a projection beam of radiation;

an array of individually controllable elements serving to impart the projection beam with a pattern in its cross-section to form a patterned beam; and

a projection system for projecting the patterned beam onto a target portion of a substrate;

a substrate supply arranged to output at least one unbroken length of substrate; and

a substrate conveying system arranged to convey each outputted unbroken length of substrate from the substrate supply and past the projection system such that the projection system is able to project the patterned beam onto a series of target portions along each unbroken length of substrate.

2. The substrate processing apparatus of claim 1, wherein the substrate conveying system is arranged to convey each outputted unbroken length of substrate in an uninterrupted manner from the substrate supply and past the projection system.

3. The substrate processing apparatus of claim 1, wherein the substrate supply comprises a roll of substrate, and the substrate supply is arranged to output each unbroken length of substrate from the roll.

4. The substrate processing apparatus of claim 3, wherein the roll of substrate comprises a layer of separating material arranged between adjacent layers of substrate.

5. The substrate processing apparatus of claim 4, further comprising a separating system for separating the layer of separating material from the outputted substrate before the outputted substrate is conveyed past the projection system.

6. The substrate processing apparatus of claim 1, wherein the substrate supply comprises a reel, the at least one unbroken length of substrate is wound onto the reel, and the substrate supply is arranged to output each unbroken length from the reel.

7. The substrate processing apparatus of claim 6, wherein the substrate is a glass substrate.

8. The substrate processing apparatus of claim 1, wherein each unbroken length of substrate has a length to width ratio of at least one.

9. The substrate processing apparatus of claim 1, wherein each unbroken length of substrate has a substantially uniform width and a length at least five times as large as the width.

10. The substrate processing apparatus of claim 1, wherein the substrate supply is arranged to output a plurality of individual unbroken lengths of substrate.

11. The substrate processing apparatus of claim 10, wherein the substrate conveying system is arranged to convey the plurality of individual unbroken lengths of substrate from the substrate supply and past the projection system in a series.

12. The substrate processing apparatus of claim 11, wherein the series is a continuous series.

40. A device manufactured using apparatus in accordance with claim 1.

41. The device of claim 40, wherein the device is a flat panel display.

13-32. -32. (canceled)

33. A device manufacturing method comprising the steps of:

providing a substrate supply;

outputting from the supply at least one unbroken length of substrate;

providing a projection beam of radiation using an illumination system;

using an array of individually controllable elements to impart the projection beam with a pattern in its cross-section to form a patterned beam;

using a projection system to project the patterned beam;

conveying each outputted unbroken length of substrate from the substrate supply and past the projection system; and

projecting the patterned beam onto a series of target portions along each unbroken length of substrate.

34. The method of claim 33, wherein the step of providing a substrate supply comprises providing each unbroken length of substrate on a roll.

35. The method of claim 34, wherein the substrate is glass.

36. The method of claim 33, further comprising the step of collecting each unbroken length of substrate on a roll after exposure to the patterned beam.

37. The method of claim 33, further comprising the steps of:

processing each unbroken length of substrate in at least one additional processing stage; and

conveying each outputted unbroken length of substrate from the substrate supply, through the at least one additional processing stage, and past the projection system.

38. A device manufactured using a method in accordance with claim 33.

39. The device of claim 38, wherein the device is a flat panel display.