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FABRICATION OF STRUCTURES IN AN OPTICAL SUBSTRATE

  • US 20060133728A1
  • Filed: 12/22/2004
  • Published: 06/22/2006
  • Est. Priority Date: 12/22/2004
  • Status: Active Grant
First Claim
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1. A system for fabricating structures in an optical substrate, the system comprising:

  • an optical element that produces first and second write beams that intersect at a first intersection location at the optical substrate and first and second reference beams that intersect and are recombined at a second intersection location in substantially the same plane as the first intersection location, the first intersection location including a fringe pattern produced by the first and second write beams; and

    a controller that controls relative positioning between the optical substrate and the fringe pattern based on a signal derived from the recombined first and second reference beams.

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