Air oxidizable scratch resistant protective layer for optical coatings
First Claim
1. An article with improved scratch protection, comprising a substrate, an optical coating comprising one or more layers on the substrate, and an outermost scratch protection layer comprising a protective metal, metal alloy, metal compound or intermetallic coating, wherein said outermost scratch protection layer is 1 to 3 nm thick.
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Abstract
The present invention provides a scratch protecting layer comprising a metal, metal alloy, metal compound or an intermetallic layer deposited on an air contacting surface. The scratch protecting layer is typically from 1 to 3 nanometers thick and not optically absorbing after oxidation occurs. This layer is initially deposited in a primarily unoxidized or un-nitrided state. Full oxidation of the metal, metal alloy, metal compound or intermetallic layer occurs within several days after exposure to air. The scratch protection layer can be 2 to 5 nanometers thick if the layer is exposed to a plasma, electrical discharge or ion beam comprising a reactive gas such as oxygen or nitrogen.
86 Citations
27 Claims
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1. An article with improved scratch protection, comprising
a substrate, an optical coating comprising one or more layers on the substrate, and an outermost scratch protection layer comprising a protective metal, metal alloy, metal compound or intermetallic coating, wherein said outermost scratch protection layer is 1 to 3 nm thick.
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12. An article with improved scratch protection, comprising
a substrate, an optical coating comprising one or more layers on the substrate, and an outermost scratch protection layer comprising a protective metal, wherein said outermost scratch protection layer is 2 to 5 nm thick.
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13. A method for improving the scratch protection of optical coatings on an article, comprising
depositing an optical coating comprising one or more layers on an article, depositing a 1-3 nm layer comprising an unoxidized metal, metal alloy, metal compound or intermetallic on said optical coating to provide a scratch protection layer, and oxidizing said metal, metal alloy, metal compound or intermetallic layer.
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26. A method for improving scratch protection of an article with an optical coating, comprising
depositing an optical coating comprising one or more layers on an article, depositing a 2-5 nm layer comprising an unoxidized metal, metal alloy, metal compound or intermetallic layer on said optical coating to provide a scratch protection layer, and oxidizing said metal, metal alloy, metal compound or intermetallic layer by exposure to a plasma, electrical discharge or ion beam comprising a reactive gas.
Specification