Deposition of LiCoO2
First Claim
1. A method of depositing a LiCoO2 layer, comprising:
- placing a substrate in a reactor;
flowing a gaseous mixture including argon and oxygen through the reactor; and
applying pulsed DC power to a target formed of LiCoO2 positioned opposite the substrate, wherein a crystalline layer of LiCoO2 is deposited over the substrate.
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Abstract
In accordance with the present invention, deposition of LiCoO2 layers in a pulsed-dc physical vapor deposition process is presented. Such a deposition can provide a low-temperature, high deposition rate deposition of a crystalline layer of LiCoO2 with a desired <101> or <003> orientation. Some embodiments of the deposition addresses the need for high rate deposition of LiCoO2 films, which can be utilized as the cathode layer in a solid state rechargeable Li battery. Embodiments of the process according to the present invention can eliminate the high temperature (>700° C.) anneal step that is conventionally needed to crystallize the LiCoO2 layer. Some embodiments of the process can improve a battery utilizing the LiCoO2 layer by utilizing a rapid thermal anneal process with short ramp rates.
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Citations
43 Claims
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1. A method of depositing a LiCoO2 layer, comprising:
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placing a substrate in a reactor;
flowing a gaseous mixture including argon and oxygen through the reactor; and
applying pulsed DC power to a target formed of LiCoO2 positioned opposite the substrate, wherein a crystalline layer of LiCoO2 is deposited over the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A battery structure, comprising:
a crystalline LiCoO2 layer deposited over a low-temperature substrate. - View Dependent Claims (22, 23, 24, 25, 26)
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27. A stacked battery structure, comprising:
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one or more battery stacks deposited on a thin substrate, wherein each battery stack comprises;
a conducting layer, a LiCoO2 layer deposited as a crystalline layer over the conducting layer, a LiPON layer deposited over the crystalline LiCoO2 layer, an anode layer deposited over the LiPON layer; and
a top conducting layer deposited over the one or more battery stacks. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35)
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36. A method of producing a battery, comprising:
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loading a substrate into a cluster tool;
depositing a crystalline LiCoO2 layer over a conducting layer in a chamber of the cluster tool with a pulsed-dc PVD process. - View Dependent Claims (37, 38, 39, 40, 41, 42)
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43. A fixture for holding a thin substrate, comprising:
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a top portion; and
a bottom portion, wherein the thin substrate is held when the top portion is attached to the bottom portion.
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Specification