Electrostatically actuated gas valve
First Claim
Patent Images
1. A gas valve comprising:
- a valve body comprising a gas inlet, a gas outlet, and a conduit connecting the gas inlet and the gas outlet, the conduit comprising a first flow chamber, a second flow chamber and a third flow chamber;
a first electrostatic diaphragm pilot valve disposed between the first flow chamber and the second flow chamber; and
a second electrostatic diaphragm pilot valve disposed between the second flow chamber and the third flow chamber.
1 Assignment
0 Petitions
Accused Products
Abstract
A gas valve body with a first flow chamber and, a second flow chamber including and a main valve positioned in line and between the first flow chamber and the second flow chamber. The main valve can be opened by creating a pressure differential across the main valve. An electrostatically controlled pilot valve is provided for controlling the pressure differential across the main valve for “on-ff” operation. The electrostatically controlled pilot valve may also be operated to “modulate” the pressure differential across the main valve along a range of pressure differential values.
110 Citations
39 Claims
-
1. A gas valve comprising:
-
a valve body comprising a gas inlet, a gas outlet, and a conduit connecting the gas inlet and the gas outlet, the conduit comprising a first flow chamber, a second flow chamber and a third flow chamber;
a first electrostatic diaphragm pilot valve disposed between the first flow chamber and the second flow chamber; and
a second electrostatic diaphragm pilot valve disposed between the second flow chamber and the third flow chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
-
-
23. A gas valve comprising:
-
a valve body comprising a gas inlet, a gas outlet, and a conduit connecting the gas inlet and the gas outlet, the conduit comprising a first flow chamber, a second flow chamber and a third flow chamber;
a first electrostatic diaphragm valve disposed between the first flow chamber and the second flow chamber;
a second electrostatic diaphragm valve disposed between the second flow chamber and the third flow chamber; and
a pressure sensor in fluid communication with the gas outlet. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
-
-
34. A gas valve comprising:
-
a first flow chamber;
a second flow chamber;
a first main valve positioned between the first flow chamber and the second flow chamber, wherein the first main valve is opened by a pressure differential across the first main valve; and
a first electrostatically controlled valve for controlling the pressure differential across the first main valve. - View Dependent Claims (35, 36, 37, 38, 39)
-
Specification