Sensor assembly, digital serial bus and protocol, sensor network, and lithographic apparatus and system
First Claim
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1. A sensor assembly, comprising:
- a sensor configured to output sensor data;
an analog-to-digital converter configured to receive an analog signal corresponding to the sensor data and to output a digital signal of the sensor data; and
a local processor that is electrically coupled to analog-to-digital converter and is configured to receive a first data transmission from a remote processor and to transmit a second data transmission, wherein the local processor is configured to transmit the second data transmission based on information received in the first data transmission.
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Abstract
An sensor assembly according to one embodiment includes a sensor, an analog-to-digital converter configured to digitize a data signal received from the sensor, and an array of logic elements configured to receive a first data transmission over a serial bus and to transmit a second data transmission including information in the digitized signal over the serial bus. The array of logic elements is configured to transmit the second data transmission according to information received in the first data transmission.
10 Citations
31 Claims
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1. A sensor assembly, comprising:
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a sensor configured to output sensor data;
an analog-to-digital converter configured to receive an analog signal corresponding to the sensor data and to output a digital signal of the sensor data; and
a local processor that is electrically coupled to analog-to-digital converter and is configured to receive a first data transmission from a remote processor and to transmit a second data transmission, wherein the local processor is configured to transmit the second data transmission based on information received in the first data transmission. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of providing data to a remote processor, said method comprising:
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receiving information over a serial data line from the remote processor;
generating an analog signal corresponding to a condition sensed at a measurement site;
at a location local to the measurement site, obtaining a digital signal based on the analog signal;
at the location local to the measurement site, outputting a serial data stream based on the digital signal; and
transporting information over the serial data line to the remote processor, wherein at least one among said generating the analog signal, obtaining the digital signal, and outputting the serial data stream is performed in accordance with the information received over the serial data line. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22)
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23. A method of data acquisition, said method comprising:
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transmitting digital control information to a sensor assembly in a vacuum area over a serial data bus, said digital control information including an address of the sensor unit; and
based on the control information, receiving a serial data stream over the serial data bus, said serial data stream including digital sensor data from the sensor assembly. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31)
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Specification