Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus
First Claim
1. A method for measuring information provided by a substrate, the substrate comprising a feature that has been created by a lithographic apparatus, the method comprising:
- projecting a beam of light onto a marker disposed above and/or near the feature on the substrate; and
detecting information provided by said marker with a sensor;
wherein a coating is disposed on the substrate so that the coating lies between the beam of light and the feature to substantially prevent the beam of light from being reflected by the feature and causing an inaccurate readout of the information provided by the marker.
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Accused Products
Abstract
A method for measuring information provided by a substrate is disclosed. The substrate includes a feature that has been created by a lithographic apparatus. The method includes projecting a beam of light onto a marker disposed above and/or near the feature on the substrate, and detecting information provided by the marker with a sensor. A coating is disposed on the substrate so that the coating lies between the beam of light and the feature to substantially prevent the beam of light from being reflected by the feature and causing an inaccurate readout of the information provided by the marker.
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Citations
67 Claims
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1. A method for measuring information provided by a substrate, the substrate comprising a feature that has been created by a lithographic apparatus, the method comprising:
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projecting a beam of light onto a marker disposed above and/or near the feature on the substrate; and
detecting information provided by said marker with a sensor;
wherein a coating is disposed on the substrate so that the coating lies between the beam of light and the feature to substantially prevent the beam of light from being reflected by the feature and causing an inaccurate readout of the information provided by the marker. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A substrate for use in a lithographic apparatus, the substrate comprising:
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a feature created by the lithographic apparatus;
a marker created in a layer of resist above and/or near the feature, the marker being arranged to provide information about the substrate; and
a coating for substantially preventing a beam of light used for detecting the information provided by the marker from being reflected by the feature and causing an inaccurate readout of the information provided by the marker. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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44. A lithographic apparatus in combination with a substrate for use in the lithographic apparatus, the lithographic apparatus comprising:
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an illumination system for conditioning a beam of radiation;
a support for supporting a patterning device, the patterning device serving to impart the beam of radiation with a pattern in its cross-section;
a substrate table for supporting the substrate;
a projection system for projecting the patterned beam of radiation onto a target portion of the substrate; and
a sensor for measuring information about the substrate; and
the substrate comprising;
a feature created by patterning the beam of radiation with the patterning device and projecting the patterned beam of radiation with the projection system onto the target portion of the substrate;
a marker created in a layer of resist above and/or near the feature, the marker being arranged to provide the information about the substrate; and
a coating for substantially preventing a beam of light from the sensor in the lithographic apparatus from being reflected by the feature and causing an inaccurate readout of the information provided by the marker. - View Dependent Claims (45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67)
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Specification