Liquid crystal display device and fabricating method thereof, and thin film patterning method applied thereto
First Claim
1. A liquid crystal display device, comprising:
- a gate line on a substrate;
a data line crossing the gate line with a gate insulating film therebetween to define a pixel area;
a thin film transistor connected to the gate line and the data line;
a semiconductor pattern which forms a channel of the thin film transistor and overlaps along the data line;
a passivation film covering the data line and the thin film transistor; and
a pixel electrode on the gate insulating film in a pixel hole of the pixel area that penetrates the passivation film and connected to the thin film transistor, the pixel electrode on an inclined side surface of the passivation film to encompass the pixel hole, to form a border with the passivation film and having a thickness that decreases as it goes up the side surface of the passivation film.
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Abstract
A liquid crystal display device, including: a gate line on a substrate; a data line crossing the gate line with a gate insulating film therebetween to define a pixel area; a thin film transistor connected to the gate line and the data line; a semiconductor pattern which forms a channel of the thin film transistor and overlaps along the data line; a passivation film covering the data line and the thin film transistor; and a pixel electrode on the gate insulating film in a pixel hole of the pixel area that penetrates the passivation film and connected to the thin film transistor, the pixel electrode on an inclined side surface of the passivation film to encompass the pixel hole, to form a border with the passivation film and having a thickness that decreases as it goes up the side surface of the passivation film.
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Citations
28 Claims
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1. A liquid crystal display device, comprising:
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a gate line on a substrate;
a data line crossing the gate line with a gate insulating film therebetween to define a pixel area;
a thin film transistor connected to the gate line and the data line;
a semiconductor pattern which forms a channel of the thin film transistor and overlaps along the data line;
a passivation film covering the data line and the thin film transistor; and
a pixel electrode on the gate insulating film in a pixel hole of the pixel area that penetrates the passivation film and connected to the thin film transistor, the pixel electrode on an inclined side surface of the passivation film to encompass the pixel hole, to form a border with the passivation film and having a thickness that decreases as it goes up the side surface of the passivation film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A liquid crystal display device, comprising:
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a gate line and a data line crossing each other with a gate insulating film therebetween to define a pixel area;
a thin film transistor connected to the gate line and the data line;
a pixel electrode on the gate insulating film of the pixel area connected to the thin film transistor; and
a passivation film on the gate insulating film except where the pixel electrode is formed to form a border with the pixel electrode.
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12. A method of fabricating a liquid crystal display device, comprising:
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a first mask process of forming a gate line on a substrate and a gate electrode connected to the gate line;
a second mask process of forming a gate insulating film covering the gate line and the gate electrode, a semiconductor pattern on the gate insulating film, a data line crossing the gate line on the semiconductor pattern to define a pixel area, a source electrode connected to the data line, and a drain electrode facing the source electrode; and
a third mask process of forming a passivation film covering the data line, the source electrode and the drain electrode, and forming a pixel hole which penetrates the passivation film in the pixel area and forming a pixel electrode connected to the drain electrode in the pixel hole, wherein the pixel electrode formed on a side surface of the passivation film to encompass the pixel hole, to form a border with the passivation film, and having its thickness decrease as it goes up on the side surface of the passivation film. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A method of fabricating a liquid crystal display device, comprising:
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forming a gate line and a data line crossing each other with a gate insulating film therebetween to define a pixel area, and a thin film transistor connected to the gate line and the data line;
forming a passivation film on the substrate;
forming a photo-resist pattern on the passivation film;
patterning the passivation film by a wet etching using the photo-resist pattern as a mask;
forming a transparent conductive film on the substrate; and
forming a pixel electrode by patterning the transparent conductive film by removing the photo-resist pattern where the transparent conductive film is formed, wherein the pixel electrode is formed on the gate insulating film and connected to the thin film transistor.
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27. A method of patterning thin films, comprising:
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forming a first thin film on a substrate;
forming a photo-resist pattern on the first thin film;
over-etching the exposed first thin film through the photo-resist pattern by a wet etching;
forming a second thin film covering the photo-resist pattern; and
patterning the second thin film by removing the photo-resist pattern where the second thin film is formed. - View Dependent Claims (28)
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Specification