Methods and systems for lithographic beam generation
First Claim
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1. A lithographic apparatus, comprising:
- an illumination system that supplyies a projection beam of radiation;
an array of individually controllable elements serving that imparts the projection beam with a pattern in its cross-section;
a substrate table that holds a substrate; and
a projection system that projects the patterned beam onto a target portion of the substrate;
wherein the illumination system includes a beam delivery system having at least one radiation beam deflecting element and at least one radiation input that receives a plurality of source radiation beams from respective radiation sources, said at least one radiation beam deflecting element being arranged to deflect each of the received source radiation beams along a single common beam path, to provide said projection beam of radiation.
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Abstract
A lithographic illumination apparatus and method includes receiving a plurality of source radiation beams from a plurality of corresponding radiation sources, deflecting the plurality of source radiation beams along a common beam path, thereby generating a projection beam of radiation, imparting the projection beam of radiation with a cross-section pattern, and projecting the patterned projection beam of radiation onto a target portion of a substrate.
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Citations
20 Claims
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1. A lithographic apparatus, comprising:
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an illumination system that supplyies a projection beam of radiation;
an array of individually controllable elements serving that imparts the projection beam with a pattern in its cross-section;
a substrate table that holds a substrate; and
a projection system that projects the patterned beam onto a target portion of the substrate;
wherein the illumination system includes a beam delivery system having at least one radiation beam deflecting element and at least one radiation input that receives a plurality of source radiation beams from respective radiation sources, said at least one radiation beam deflecting element being arranged to deflect each of the received source radiation beams along a single common beam path, to provide said projection beam of radiation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of projecting a pattern onto a substrate, comprising:
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receiving a plurality of source radiation beams from a plurality of corresponding radiation sources;
deflecting the plurality of source radiation beams along a common beam path, thereby generating a projection beam of radiation;
imparting the projection beam of radiation with a cross-section pattern; and
projecting the patterned projection beam of radiation onto a target portion of a substrate. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification