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Methods and systems for lithographic beam generation

  • US 20060139609A1
  • Filed: 12/29/2004
  • Published: 06/29/2006
  • Est. Priority Date: 12/29/2004
  • Status: Active Grant
First Claim
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1. A lithographic apparatus, comprising:

  • an illumination system that supplyies a projection beam of radiation;

    an array of individually controllable elements serving that imparts the projection beam with a pattern in its cross-section;

    a substrate table that holds a substrate; and

    a projection system that projects the patterned beam onto a target portion of the substrate;

    wherein the illumination system includes a beam delivery system having at least one radiation beam deflecting element and at least one radiation input that receives a plurality of source radiation beams from respective radiation sources, said at least one radiation beam deflecting element being arranged to deflect each of the received source radiation beams along a single common beam path, to provide said projection beam of radiation.

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