Projection system for a lithograhic apparatus
First Claim
1. A projection system for projecting radiation onto a substrate, comprising:
- a plurality of mirror imaging systems each comprising at least two mirrors, wherein each mirror imaging system is arranged to direct radiation onto an associated imaging field.
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Accused Products
Abstract
A projection system for a lithographic apparatus having a plurality of mirror imaging systems. In an embodiment, the mirror imaging systems are arranged in two rows with each row being perpendicular to a scanning direction of the projection system. Each mirror imaging systems has an associated imaging field. The mirror imaging systems are arranged in a manner that precludes gaps between adjacent imaging fields in the scanning direction. Each mirror imaging system includes a concave mirror and a convex mirror arranged concentrically with the concave mirror. The concave mirrors have a first mirror portion and a second mirror portion that are independently movable. In one embodiment, each of the mirror imaging systems has an associated phase, and the mirror imaging systems in one row are positioned 180 degrees out of phase with the mirror imaging systems in the other row.
34 Citations
17 Claims
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1. A projection system for projecting radiation onto a substrate, comprising:
a plurality of mirror imaging systems each comprising at least two mirrors, wherein each mirror imaging system is arranged to direct radiation onto an associated imaging field. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A lithographic apparatus, comprising:
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an illumination system that supplies a beam of radiation;
a patterning device that imparts the beam of radiation with a pattern;
a substrate table that supports a substrate; and
a projection system that projects the patterned beam of radiation onto a target portion of the substrate, the projection system comprises a plurality of mirror imaging systems, each mirror imaging system comprising at least two mirrors arranged to direct incident radiation onto an associated imaging field. - View Dependent Claims (14, 15)
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16. A device manufacturing method, comprising:
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(1) emitting a beam of radiation;
(2) imparting the beam of radiation with a pattern; and
(3) projecting the patterned beam of radiation onto a substrate, wherein the patterned beam of radiation is projected onto the substrate using a projection system comprises a plurality of mirror imaging systems, each mirror imaging system comprising at least two mirrors arranged to direct radiation onto an associated imaging field. - View Dependent Claims (17)
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Specification