In situ optical surface temperature measuring techniques and devices
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Accused Products
Abstract
A temperature sensor that has a thermally conducting contact with a surface that emits electromagnetic radiation in proportion to the temperature of the contact is disclosed. The sensor has a resilient member attached to the contact and configured to extend the contact toward the object to be measured. A first light waveguide is attached to the contact and is configured to transmit the electromagnetic radiation from the contact. The sensor has a guide with a bore formed therein that the first waveguide is insertable into. When the contact is moved, the first waveguide moves within the bore. A second waveguide is attached to the guide such that a variable gap is formed between the ends of the first waveguide and the second waveguide. Electromagnetic energy from the first waveguide traverses the gap and can be transmitted by the second waveguide. The guide allows the first waveguide to move with the contact in order to ensure that the contact is fully engaged with the surface of the object.
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Citations
96 Claims
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1-58. -58. (canceled)
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59. A luminescent temperature sensor comprising:
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a test substrate, said test substrate having a surface, said surface having a recess therein;
a layer of luminescent material, disposed in the recess, that emits electromagnetic radiation having a detectable optical characteristic functionally dependent on the temperature of the test substrate; and
a light waveguide in optical communication with the layer of luminescent material. - View Dependent Claims (60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80)
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81. A test device for measuring a temperature in a processing step, the test device comprising:
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a test substrate, said test substrate having a surface, said surface having a recess therein;
a layer of luminescent material wholly contained in the recess, wherein the luminescent material emits electromagnetic radiation having a detectable optical characteristic that is functionally dependent on the temperature of the test substrate in response to a source of excitation radiation; and
an optical window that seals said layer of luminescent material in the recess in the surface of the substrate. - View Dependent Claims (82, 83, 84, 85, 86)
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87. A supporting device for supporting a test substrate having a surface with a recess, comprising:
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a support;
a source of excitation radiation disposed in the support, the source of excitation radiation configured to pass excitation radiation to a layer of luminescent material; and
a waveguide disposed in the support, wherein the waveguide is in optical communication with a layer of luminescent material and the waveguide is configured to measure temperature dependent luminescent radiation emitted by a layer of luminescent material. - View Dependent Claims (88, 89, 90)
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91. A vacuum processing chamber for performing a processing step, the vacuum processing chamber comprising:
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a chamber;
a test substrate, said test substrate having a surface, said surface having a recess therein;
a layer of luminescent material wholly contained within the recess of the test substrate, wherein the luminescent material emits electromagnetic radiation having a detectable optical characteristic that is functionally dependent on the temperature of the test substrate in response to a source of excitation radiation;
a support disposed within the chamber, the support horizontally or vertically supporting the test substrate;
a source of excitation radiation disposed in the support, the source of excitation radiation configured to pass excitation radiation to the layer of luminescent material within the recess of the test substrate; and
a waveguide disposed in the support, the waveguide in optical communication with the layer of luminescent material, wherein the waveguide is configured to measure temperature dependent luminescent radiation emitted by the layer of luminescent material. - View Dependent Claims (92, 93, 94, 95, 96)
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Specification