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Micropump and method for the production thereof

  • US 20060140782A1
  • Filed: 09/04/2003
  • Published: 06/29/2006
  • Est. Priority Date: 09/11/2002
  • Status: Active Grant
First Claim
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1. A micropump with a pump membrane which can be moved by modifying the volume of a pump chamber which is adjacent to the pump membrane and a base part, also comprising two valves which are arranged in recesses in the base part and react to the pressure in the pump chamber in order to alternately open and close an inlet channel and an outlet channel for a medium to be pumped, wherein the valves are formed without any common components by standalone functioning valve modules comprising a valve seat and a valve body.

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