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Analysis apparatus and method comprising auto-focusing means

  • US 20060142662A1
  • Filed: 06/15/2004
  • Published: 06/29/2006
  • Est. Priority Date: 06/19/2003
  • Status: Abandoned Application
First Claim
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1. An analysis apparatus, in particular a spectroscopic analysis apparatus, for analyzing an object comprising:

  • an excitation system for emitting an excitation beam to excite a target region, a monitoring system comprising a monitoring beam source for emitting a monitoring beam and an imaging system to image the target region, a detection system for detecting scattered radiation from the target region generated by the excitation beam, focusing means for focusing the excitation system, the monitoring system and the detection system on a detection plane in the target region, image processing means for determining image characteristics, which indicate if the imaging system is focused on the object to be analyzed, from a detected image, and auto-focusing means for controlling the focusing means to change the focusing of the monitoring system, the excitation system and the detection system based on the determined image characteristics, for controlling the monitoring system to image the target region and for controlling the image processing means to determine the image characteristics from a detected image until the object substantially lies in the detection plane.

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