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System and method for fault indication on a substrate in maskless applications

  • US 20060142967A1
  • Filed: 12/28/2004
  • Published: 06/29/2006
  • Est. Priority Date: 12/28/2004
  • Status: Active Grant
First Claim
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1. A method for indicating fault on a substrate, comprising:

  • (a) determining whether data includes at least one suspicious bit;

    (b) controlling a pattern generator with the data;

    (c) patterning a beam of radiation using the pattern generator;

    (d) projecting features in the patterned beam of radiation onto a target portion of a substrate; and

    (e) projecting one or more markers in the patterned beam onto the substrate indicating the target portions that correspond with the at least one suspicious bit as determined in step (a).

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