Piezoresistive pressure sensor

• US 20060144152A1
• Filed: 12/30/2004
• Published: 07/06/2006
• Est. Priority Date: 12/30/2004
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Wang, Tzu-Yu, Cabuz, Cleopatra, Cabuz, Eugen I.
• Granted Patent: US 7,546,772 B2
• Time in Patent Office: Days
• US Class Current: 73/715
• CPC Class Codes: G01L 9/0055 bonded on a diaphragm

Abstract

A pressure sensor includes a housing portion with a fluid inlet and a polymer element within the housing portion. The polymer element may be coated with piezoresistive material to form a first resistor and may have associated electrodes. The polymer element includes a first resistance value that changes to a second resistive value in a response to a predetermined condition. The pressure sensor may also include a second polymer element that includes a first resistance value that changes to a second resistive value in a response to a predetermined condition.

Claims

1. A pressure sensor comprising:

a housing portion with a fluid inlet; and

a polymer substrate within the housing portion and coated with piezoresistive material, wherein the piezoresistive material coated on the polymer substrate forms a first resistor, wherein the polymer substrate includes a first resistance value that changes to a second resistive value in a response to a predetermined condition.

2. The pressure sensor of claim 1 wherein the predetermined condition includes the polymer substrate under applied pressure to deflect.

6. The pressure sensor of claim 1 wherein the polymer substrate is on a plane that is perpendicular to the fluid inlet.

7. The pressure sensor of claim 1 wherein the predetermined condition includes a change in an environmental condition.

8. The pressure sensor of claim 2 wherein the substrate deflects at an applied pressure through the fluid inlet.

9. The pressure sensor of claim 1 wherein the first resistor includes two or more resistors.

10. The pressure sensor of claim 1 wherein the housing portion includes a stationary resistor formed of piezoresistive material.

11. The pressure sensor of claim 10 wherein the stationary resistor includes two or more resistors.

12. The pressure sensor of claim 10 wherein the stationary resistor is a reference resistor to substantially decouple the response of the polymer substrate from a change in an environmental condition.

3. The pressure sensor of claim I wherein the polymer substrate includes a central region, an edge region, a first electrode over the central region, and a second electrode over the edge region.

4. The pressure sensor of claim 3 wherein the piezoresistive material is deposited between the central region and the edge region.

5. The pressure sensor of claim 3 wherein the piezoresistive material is deposited in a spiral pattern between the central region and the edge region.

13. A pressure sensor comprising:

a housing with a fluid inlet fluidically coupled with a chamber;

a first polymer element within the housing having a first resistor formed of piezoresistive material and at least one electrode; and

a second polymer element within the housing having a second resistor formed of piezoresistive material and at least one electrode.

14. The pressure sensor of claim 13 wherein the first polymer element is curved in a stored position, and wherein the second polymer element is curved in a stored position.

15. The pressure sensor of claim 13 wherein the chamber is between the first polymer element and the second polymer element.

16. The pressure sensor of claim 13 wherein at least one of the first and second polymer elements deflects from a stored position to an active position upon applied pressure into the fluid inlet.

17. The pressure sensor of claim 13 wherein the first and second polymer elements deflect in opposite directions in response to applied pressure into the fluid inlet.

18. The pressure sensor of claim 13 wherein the housing includes a first stopper associated with the first polymer element and a second stopper associated with the second polymer element.

19. The pressure sensor of claim 13 wherein the first polymer element has a first side and a second opposite side that faces the chamber, wherein the second polymer element has a first side and a second opposite side that faces the chamber, wherein the first resistor is on the first side of the first polymer element, and the second resistor is on the first side of the second polymer element.

20. The pressure sensor of claim 19 further comprising means for protecting the pressure sensor device from being damaged.

21. The pressure sensor of claim 20 wherein the housing includes at least one stopper adjacent at least one of the first side of the first polymer element and the first side of the second polymer element, wherein the means for protecting includes the at least one stopper.

22. The pressure sensor of claim 13 wherein the pressure sensor is used in a vacuum application.

23. The pressure sensor of claim 13 wherein the housing includes a vent.

24. A process comprising:

applying pressure at a fluid inlet;

deflecting a polymer element having a piezoresistor, a first electrode and a second electrode deposited thereon; and

measuring a variation in resistance of the piezoresistor to calculate the applied pressure, wherein the variation in resistance is directly or indirectly proportional to the applied pressure.

25. The process of claim 24 wherein the polymer element includes a diaphragm.

26. The process of claim 24 wherein the polymer element includes a curved pre-formed element.

27. The process of claim 24 wherein measuring the variation in resistance includes measuring a voltage difference between the first and second electrodes.