×

Common centroid micromachine driver

  • US 20060144174A1
  • Filed: 09/30/2005
  • Published: 07/06/2006
  • Est. Priority Date: 10/01/2004
  • Status: Active Grant
First Claim
Patent Images

1. Apparatus comprising:

  • a resonator mass movable along an axis; and

    a drive arrangement for moving the mass along the axis, the drive arrangement having a plurality of fixed electrodes operably coupled so as to have a common centroid.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×