Common centroid micromachine driver
First Claim
Patent Images
1. Apparatus comprising:
- a resonator mass movable along an axis; and
a drive arrangement for moving the mass along the axis, the drive arrangement having a plurality of fixed electrodes operably coupled so as to have a common centroid.
1 Assignment
0 Petitions
Accused Products
Abstract
A drive arrangement for a micromachine includes a plurality of fixed electrodes arranged so as to have a common centroid.
-
Citations
20 Claims
-
1. Apparatus comprising:
-
a resonator mass movable along an axis; and
a drive arrangement for moving the mass along the axis, the drive arrangement having a plurality of fixed electrodes operably coupled so as to have a common centroid. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
- 10. Apparatus comprising a plurality of resonator masses, each resonator mass associated with at least one drive arrangement for moving the mass along an axis, each drive arrangement having a plurality of fixed electrodes operably coupled so as to have a common centroid.
Specification