Driving shaft of effusion cell for deposition system and deposition system having the same

• US 20060144325A1
• Filed: 01/04/2006
• Published: 07/06/2006
• Est. Priority Date: 01/05/2005
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung SDI Company Limited
• Inventors: Jung, Sung Wha, Kang, Eu Gene
• Granted Patent: US 8,366,832 B2
• Time in Patent Office: Days
• US Class Current: 117/105
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: C23C 14/24 Vacuum evaporation
• CPC Class Codes: C30B 23/002 Controlling or regulating
• CPC Class Codes: C30B 29/54 Organic compounds

Abstract

Apparatus for a deposition system includes a sealing apparatus that seals the drive shaft from the deposition material to prevent the deposition material from adhering to the drive shaft, a moving apparatus to reduce the weight of a shelf on the drive shaft, and a collision-preventing apparatus that measures the distance between a shelf and an adjacent article.

Claims

1. A sealing apparatus for a driving shaft of a deposition system, comprising:

a shelf comprising,

a coupling part coupled with a driving shaft installed in a vacuum chamber of a deposition system,

a connection part comprising a slot, the connection part connected to the coupling part, and

a support plate connected to the connection part, the support plate supporting an effusion cell effusing an organic vapor material in the vacuum chamber;

a hollow beam partially enclosing the driving shaft, the beam comprising one open side such that the support body may be moved along the driving shaft; and

a shielding plate arranged through the slot.

2. The sealing apparatus of claim 1,

wherein the connection part of the support body has a groove formed at both edges,

wherein the beam has a wing part formed at the open side, and

wherein the wing part corresponds to the groove of the connection part.

3. The sealing apparatus of claim 2,

wherein the connection part comprises a protrusion arranged between the groove of the connection part and the coupling part, and

wherein the beam comprises a groove arranged on an inner surface that corresponds to the protrusion.

4. The sealing apparatus of claim 3,

wherein the slot is arranged at the protrusion

5. A sealing apparatus for a driving shaft of a deposition system, comprising:

a shelf comprising,

a coupling part coupled with a driving shaft installed in a vacuum chamber of a deposition system, and

a support plate connected to the coupling part, the support plate supporting an effusion cell effusing an organic vapor material in the vacuum chamber;

a first tube encircling the driving shaft, the first tube arranged above the coupling part; and

a second tube encircling the driving shaft, the second tube arranged below the coupling part.

6. The sealing apparatus of claim 5,

wherein a lower end of the first tube is fixed to an upper surface of the coupling part, and

wherein an upper end of the second tube is fixed to a lower surface of the coupling part.

7. The sealing apparatus of claim 5,

wherein the first tube and the second tube may be expanded and compressed.

8. The sealing apparatus of claim 7,

wherein the first tube and second tube comprise a bellows type structure.

9. The sealing apparatus of claim 6,

wherein the first tube and the second tube may be expanded and compressed.

10. The sealing apparatus of claim 9,

wherein the first tube and the second tube comprise a bellows type structure.

11. A deposition system comprising:

a vacuum chamber;

a chuck supporting a substrate aligned with a mask arranged at one side of the vacuum chamber;

a driving shaft arranged at the other side of the vacuum chamber;

a shelf comprising,

a coupling part coupled with the driving shaft,

a connection part comprising a slot, the connection part connected to the coupling part, and

a support plate connected to the connection part;

an effusion cell arranged on the support plate, the effusion cell effusing an organic vapor material toward the substrate;

a hollow beam partially enclosing the driving shaft, the beam comprising one open side such that the support body may be moved along the driving shaft; and

a shielding plate arranged through the slot.

12. The deposition system of claim 11,

wherein the connection part of the support body has a groove formed at both edges,

wherein the beam has a wing part formed at the open side, and

wherein the wing part corresponds to the groove of the connection part.

13. The deposition system of claim 12,

wherein the connection part comprises a protrusion arranged between the groove of the connection part and the coupling part, and

wherein the beam comprises a groove arranged on an inner surface that corresponds to the protrusion.

14. A deposition system comprising:

a vacuum chamber;

a chuck supporting a substrate aligned with a mask arranged at one side of the vacuum chamber;

a driving shaft arranged at the other side of the vacuum chamber;

a shelf comprising,

a coupling part coupled with the driving shaft, and

a support plate connected to the coupling part;

an effusion cell arranged on the support plate, the effusion cell effusing an organic vapor material toward the substrate;

a first tube encircling the driving shaft, the first tube arranged above the coupling part; and

a second tube encircling the driving shaft, the second tube arranged below the coupling part.

15. The deposition system of claim 14,

wherein a lower end of the first tube is fixed to an upper surface of the coupling part, and

wherein an upper end of the second tube is fixed to a lower surface of the coupling part.

16. The sealing apparatus of claim 14,

wherein the first tube and the second tube may be expanded and compressed.

17. The sealing apparatus of claim 16,

wherein the first tube and the second tube comprise a bellows type structure.

18. The sealing apparatus of claim 15,

wherein the first tube and the second tube may be expanded and compressed.

19. The sealing apparatus of claim 18,

wherein the first tube and the second tube comprise a bellows type structure.

20. A moving apparatus for an effusion cell, comprising:

a shelf;

an effusion apparatus arranged on the shelf;

a driving shaft coupled with the shelf in such a way that the shelf is moved up or down by the rotation of the driving shaft;

a weight; and

a connector having one end coupled with the shelf and the other end coupled with the weight.

21. The moving apparatus of claim 20, further comprising:

a pulley,

wherein the connector is partially wound on the pulley.

22. The moving apparatus of claim 20,

wherein the weight of the weight is approximately equal to the weight of the shelf or the total weight of the shelf and the effusion apparatus.

23. The moving apparatus of claim 21,

wherein the pulley is rotatably fixed to a substantially vertical fixed support frame.

24. The moving apparatus of claim 23,

wherein the support frame is provided with a guide plate, and

wherein the guide plate guides the movement of the shelf and the weight.

25. A collision-preventing apparatus for an effusion cell, comprising:

a driving part comprising,

a driving source,

a driving shaft driven by the driving source,

at least one shelf coupled to the driving shaft in such as way that the at least one shelf is moved up or down by the rotation of the driving shaft, and

an effusion apparatus arranged on the shelf;

a detection part comprising,

a sensor measuring a distance from an adjacent article; and

a control part comparing data collected from the sensor of the detection part with preset data to control the operation of the driving part.

26. The collision-preventing apparatus of claim 25,

wherein the sensor is one selected from the group consisting of an ultrasonic sensor, a light sensor, an optical fiber sensor, an infrared ray sensor, and an ultra violet sensor.

27. The collision-preventing apparatus of claim 25,

wherein the control part stops the operation of the driving part when a measured distance between the at least one shelf and an adjacent article is equal to a preset distance between the shelf and the adjacent article.

28. The collision-preventing apparatus of claim 26,

wherein the control part stops the operation of the driving part when a measured distance between the at least one shelf and an adjacent article is equal to a preset distance between the shelf and the adjacent article.

29. The collision-preventing apparatus of claim 25,

wherein the control part causes the driving part to reverse the moving direction of the shelf when a measured distance between the shelf and an adjacent article is equal to a preset distance between the shelf and the adjacent article.

30. The collision-preventing apparatus of claim 26,

wherein the control part causes the driving part to reverse the moving direction of the shelf when a measured distance between the shelf and an adjacent article is equal to a preset distance between the shelf and the adjacent article.