Vacuum evaporator

• US 20060145103A1
• Filed: 01/05/2006
• Published: 07/06/2006
• Est. Priority Date: 01/06/2005
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung SDI Company Limited
• Inventors: Ryu, Seoung-Yoon, Yu, Kyong-Tae
• Granted Patent: US 7,339,182 B2
• Time in Patent Office: Days
• US Class Current: 250/581
• CPC Class Codes: C23C 14/546 using crystal oscillators

Abstract

A vacuum evaporator including a vacuum chamber and a source arranged in the vacuum chamber to supply a deposition material to a substrate on which a layer is formed. A crystal sensor measures a deposition speed of the deposition material. The crystal sensor includes an insert having a hole, and the insert is arranged in front of the crystal sensor.

Claims

1. A vacuum evaporator, comprising:

a vacuum chamber;

a source arranged at a bottom of the vacuum chamber, receiving a deposition material therein, and comprising a heater at an exterior thereof;

a substrate fixture for fixing a substrate over the source, the deposition material from the source being deposited on the substrate;

a crystal sensor arranged at a side of the substrate, and comprising an insert having a hole of a predetermined size in front of the crystal sensor.

2. The vacuum evaporator of claim 1, wherein the deposition material is one of an organic material and an inorganic material.

3. The vacuum evaporator of claim 1, wherein the crystal sensor comprises at least two inserts.

4. The vacuum evaporator of claim 1, wherein the hole has a diameter in a range of 5 mm to 13 mm.

5. The vacuum evaporator of claim 4, wherein the hole has a diameter of 8 mm.

6. The vacuum evaporator of claim 4, wherein the hole has a diameter of 13 mm.

7. The vacuum evaporator of claim 1, wherein the insert is fixed in front of the crystal sensor by a supporter.

8. The vacuum evaporator of claim 1, wherein the hole is arranged substantially in a center of the insert.

9. A vacuum evaporator, comprising:

a vacuum chamber;

a source arranged in the vacuum chamber and for supplying a deposition material to a substrate; and

a crystal sensor for measuring a deposition speed of the deposition material,

wherein the crystal sensor comprises an insert having a hole, the insert being arranged in front of the crystal sensor.

10. The vacuum evaporator of claim 9, wherein the deposition material is one of an organic material and an inorganic material.

11. The vacuum evaporator of claim 9, wherein the crystal sensor includes at least two inserts.

12. The vacuum evaporator of claim 9, wherein the hole has a diameter in a range of 5 mm to 13 mm.

13. The vacuum evaporator of claim 12, wherein the hole has a diameter of 8 mm to 13 mm

14. The vacuum evaporator of claim 9, wherein the insert is fixed in front of the crystal sensor by a supporter.

15. The vacuum evaporator of claim 9, wherein the hole is arranged substantially in a center of the insert.

16. The vacuum evaporator of claim 15, wherein the source is arranged at a bottom of the vacuum chamber, the substrate is arranged over the source, and the crystal sensor is arranged at a side of the substrate.

17. The vacuum evaporator of claim 16, wherein the insert is fixed in front of the crystal sensor by a supporter, the supporter being coupled with the crystal sensor.