Structure and programming of laser fuse
First Claim
1. A method for forming an electronic structure, comprising the steps of:
- providing a dielectric layer;
forming a first via and a second via in the dielectric layer;
filling the first and second vias with a first self-passivated electrically conducting material;
forming a fuse link layer on top of the dielectric layer, the fuse link layer comprising a second material having a characteristic of changing its electrical resistance after being exposed to a laser beam;
forming a mesa layer on top of the fuse link layer, the mesa layer comprising a third self-passivated electrically conducting material; and
forming (i) a fuse link from the fuse link layer and (ii) a first mesa and a second mesa from the mesa layer, wherein the fuse link electrically connects the first and second filled vias, wherein the first and second mesas are directly above the fuse link and directly above the first and second vias, respectively, wherein the fuse link is disposed between the first mesa and the dielectric layer, and wherein the fuse link is disposed between the second mesa and the dielectric layer.
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Accused Products
Abstract
A method and structure for fabricating a laser fuse and a method for programming the laser fuse. The laser fuse includes a dielectric layer having two vias filled with a first self-passivated electrically conducting material. A fuse link is on top of the dielectric layer. The fuse link electrically connects the two vias and includes a second material having a characteristic of changing its electrical resistance after being exposed to a laser beam. Two mesas are over the fuse link and directly over the two vias. The two mesas each include a third self-passivated electrically conducting material. The laser fuse is programmed by directing a laser beam to the fuse link. The laser beam is controlled such that, in response to the impact of the laser beam upon the fuse link, the electrical resistance of the fuse link changes but the fuse link is not blown off. Such electrical resistance change is sensed and converted to digital signal.
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Citations
11 Claims
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1. A method for forming an electronic structure, comprising the steps of:
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providing a dielectric layer;
forming a first via and a second via in the dielectric layer;
filling the first and second vias with a first self-passivated electrically conducting material;
forming a fuse link layer on top of the dielectric layer, the fuse link layer comprising a second material having a characteristic of changing its electrical resistance after being exposed to a laser beam;
forming a mesa layer on top of the fuse link layer, the mesa layer comprising a third self-passivated electrically conducting material; and
forming (i) a fuse link from the fuse link layer and (ii) a first mesa and a second mesa from the mesa layer, wherein the fuse link electrically connects the first and second filled vias, wherein the first and second mesas are directly above the fuse link and directly above the first and second vias, respectively, wherein the fuse link is disposed between the first mesa and the dielectric layer, and wherein the fuse link is disposed between the second mesa and the dielectric layer. - View Dependent Claims (2, 3, 4, 5)
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6. A method for programming a laser fuse, the laser fuse having a fuse link comprising a material having a characteristic of changing its electrical resistance after being exposed to a laser beam, the method comprising the steps of:
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providing the fuse link; and
directing the laser beam to the fuse link, the laser beam being controlled such that, in response to the impact of the laser beam upon the fuse link, the electrical resistance of the fuse link changes but the fuse link is not blown off. - View Dependent Claims (7, 8, 9, 10, 11)
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Specification