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Measurement system

  • US 20060145840A1
  • Filed: 11/23/2005
  • Published: 07/06/2006
  • Est. Priority Date: 11/24/2004
  • Status: Active Grant
First Claim
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1. A measurement system comprising:

  • at least one sensor for determining a measured value, said sensor being adapted to be disposed inside a closed process chamber;

    means for storing the measured value, said means for storing being adapted to be disposed inside a closed process chamber and receive a measured value from the at least one sensor;

    a receiver unit adapted to be disposed outside of the same closed process chamber in which the at least one sensor is adapted to be disposed inside;

    means for wireless transmission of the stored measured value to a receiver unit outside of a closed process chamber at predetermined time intervals.

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