Alignment template goodness qualification method
First Claim
1. An alignment template goodness qualification method comprising the steps of:
- a) Input a pattern image;
b) Input a pattern based alignment template;
c) Perform template goodness measurement using the pattern image and the pattern based alignment template having template goodness result output;
d) Perform template qualification using the template goodness result having template qualification result output.
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Abstract
An alignment template goodness qualification method receives a pattern image and a pattern based alignment template and performs template goodness measurement using the pattern image and the pattern based alignment template to generate template goodness result output. A template qualification is performed using the template goodness result to generate template qualification result output. If the template qualification result is acceptable, the pattern based alignment template is outputted as the qualified pattern based alignment template. Otherwise, an alternative template selection is performed using the pattern image, the pattern based alignment template and the template goodness result to generate alternative pattern based alignment template output. The template goodness measurements include signal content measurement, spatial discrimination measurement and pattern ambiguity measurement.
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Citations
28 Claims
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1. An alignment template goodness qualification method comprising the steps of:
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a) Input a pattern image;
b) Input a pattern based alignment template;
c) Perform template goodness measurement using the pattern image and the pattern based alignment template having template goodness result output;
d) Perform template qualification using the template goodness result having template qualification result output. - View Dependent Claims (2, 3, 4)
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5. An alignment template goodness measurement method comprising the steps of:
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a) Input a pattern image;
b) Input a pattern based alignment template;
c) Perform template goodness measurement selected from the set consisting of a. Signal content measurement, b. Spatial discrimination measurement, c. Pattern ambiguity measurement. - View Dependent Claims (6, 7, 8, 9, 10)
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11. An alignment signal content measurement method comprising the steps of:
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a) Input a pattern image;
b) Input a pattern based alignment template;
c) Perform region signal content measurement using the pattern image and the pattern based alignment template having at least one region signal score output;
d) Perform template signal content measurement using the pattern image and the pattern based alignment template having at least one template signal score output. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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18. An alignment template spatial discrimination measurement method comprising the steps of:
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a) Input a pattern image;
b) Input a pattern based alignment template;
c) Perform signal content measurement using the pattern image and the pattern based alignment template to generate a plurality of directional signal scores output;
d) Perform spatial discrimination measurement using the plurality of directional signal scores having at least one spatial discrimination score output. - View Dependent Claims (19, 20, 21, 22, 23, 24)
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25. An alignment template pattern ambiguity measurement method comprising the steps of:
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a) Input a pattern image;
b) Input a pattern based alignment template;
c) Perform auto-matching of the template region having an auto-matching value output;
d) Perform matching between the template and the image pixels within the neighbor of the template having a maximum matching value output. e) Divide the maximum matching value by the auto-matching value as the pattern ambiguity score output.
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26. An alignment template goodness qualification method comprising the steps of:
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a) Input a pattern image;
b) Input a pattern based alignment template;
c) Perform template qualification using the pattern image and the pattern based alignment template and select from the set consisting of;
a. Signal content measurement and qualification check;
b. Spatial discrimination measurement and qualification check;
c. Pattern ambiguity measurement and qualification check. - View Dependent Claims (27, 28)
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Specification