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Alignment template goodness qualification method

  • US 20060147105A1
  • Filed: 01/05/2005
  • Published: 07/06/2006
  • Est. Priority Date: 01/05/2005
  • Status: Abandoned Application
First Claim
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1. An alignment template goodness qualification method comprising the steps of:

  • a) Input a pattern image;

    b) Input a pattern based alignment template;

    c) Perform template goodness measurement using the pattern image and the pattern based alignment template having template goodness result output;

    d) Perform template qualification using the template goodness result having template qualification result output.

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