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Pumps with diaphragms bonded as bellows

  • US 20060147325A1
  • Filed: 12/30/2004
  • Published: 07/06/2006
  • Est. Priority Date: 12/30/2004
  • Status: Active Grant
First Claim
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1. A pump comprising:

  • a first diaphragm having a first diaphragm edge;

    a second diaphragm having a second diaphragm edge;

    the first diaphragm edge and the second diaphragm edge being bonded together so that a bellows chamber is formed between the first diaphragm and the second diaphragm;

    at least one of the first diaphragm and the second diaphragm being a piezoelectric diaphragm which displaces in accordance with application of an electrical signal.

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