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Method and structure for forming an integrated spatial light modulator

  • US 20060148121A1
  • Filed: 01/03/2005
  • Published: 07/06/2006
  • Est. Priority Date: 01/03/2005
  • Status: Active Grant
First Claim
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1. A method of fabricating an integrated spatial light modulator, the method comprising:

  • providing a first substrate including a bonding surface;

    processing a device substrate to form at least an electrode layer, the electrode layer including a plurality of electrodes;

    depositing a standoff layer on the electrode layer;

    forming standoff structures from the standoff layer; and

    joining the bonding surface of the first substrate to the standoff structures on the device substrate.

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