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Method of manufacturing a flexible thin film transistor array panel including plastic substrate

  • US 20060148141A1
  • Filed: 01/03/2006
  • Published: 07/06/2006
  • Est. Priority Date: 01/03/2005
  • Status: Active Grant
First Claim
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1. A method for manufacturing a flexible display, comprising:

  • forming a gate line comprising a gate electrode on a substrate;

    depositing a gate insulating layer covering the gate line;

    depositing a semiconductive layer covering the gate insulating layer;

    firstly etching the semiconductor layer;

    secondly etching the semiconductor layer;

    forming a data line including a source electrode and a drain electrode on the semiconductor layer; and

    forming a pixel electrode connected with the drain electrode.

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