Method of manufacturing a flexible thin film transistor array panel including plastic substrate
First Claim
Patent Images
1. A method for manufacturing a flexible display, comprising:
- forming a gate line comprising a gate electrode on a substrate;
depositing a gate insulating layer covering the gate line;
depositing a semiconductive layer covering the gate insulating layer;
firstly etching the semiconductor layer;
secondly etching the semiconductor layer;
forming a data line including a source electrode and a drain electrode on the semiconductor layer; and
forming a pixel electrode connected with the drain electrode.
3 Assignments
0 Petitions
Accused Products
Abstract
A method of manufacturing a flexible display is provided, which includes forming a gate line including a gate electrode on a substrate, sequentially depositing a gate insulating layer covering the gate line, and a semiconductor layer, firstly etching the semiconductor layer; secondly etching the semiconductor layer, forming a data line including a source electrode, and a drain electrode on the semiconductor layer and the gate insulating layer; and forming a pixel electrode connected to the drain electrode.
-
Citations
14 Claims
-
1. A method for manufacturing a flexible display, comprising:
-
forming a gate line comprising a gate electrode on a substrate;
depositing a gate insulating layer covering the gate line;
depositing a semiconductive layer covering the gate insulating layer;
firstly etching the semiconductor layer;
secondly etching the semiconductor layer;
forming a data line including a source electrode and a drain electrode on the semiconductor layer; and
forming a pixel electrode connected with the drain electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
-
Specification