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Electronic devices

  • US 20060148167A1
  • Filed: 12/12/2003
  • Published: 07/06/2006
  • Est. Priority Date: 12/14/2002
  • Status: Active Grant
First Claim
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1. A method for forming an electronic device in a multilayer structure comprising the steps of:

  • defining a topographic profile in a laterally extending first layer;

    depositing at least one non-planarizing layer on top of the first layer such that the topographic profile of the surface of the or each non-planarizing layer conforms to that of the laterally extending first layer; and

    depositing a pattern of at least one additional layer onto the top-most non-planarizing layer, such that the lateral location of the additional layer is defined by the shape of the topographic profile of the non-planarizing layer, and whereby the additional layer is laterally aligned with the topographic profile in the first layer.

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