Systems and methods for facilitating wireless communication between various components of a distributed system
First Claim
1. A system for facilitating communication between various components distributed within manufacturing equipment, said system comprising:
- at least two components associated with the manufacturing equipment;
at least one central control module associated with the manufacturing equipment;
wireless modules associated with each of said components and central control module capable of transmitting and receiving wireless signals, wherein said central control module communicates wirelessly across a wireless network with said components via said wireless module to thereby control operation of the components.
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Accused Products
Abstract
The present invention provides systems and methods for facilitating communications between various components of distributed system. Specifically, the systems and methods of the present invention provide a wireless network for linking the various components of manufacturing equipment or manufacturing systems to one or more central control devices. Each component of the manufacturing equipment and the central control devices include a wireless module for handling communications between the components and the control devices. In some embodiments, one or more of the components may act as a server for other components in the network. In some embodiments, multiple data channels are used for communication between the components and the central control devices.
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Citations
14 Claims
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1. A system for facilitating communication between various components distributed within manufacturing equipment, said system comprising:
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at least two components associated with the manufacturing equipment;
at least one central control module associated with the manufacturing equipment;
wireless modules associated with each of said components and central control module capable of transmitting and receiving wireless signals, wherein said central control module communicates wirelessly across a wireless network with said components via said wireless module to thereby control operation of the components. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A system for facilitating communication between various components distributed within semiconductor manufacturing equipment, said system comprising:
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at least two components associated with the semiconductor manufacturing equipment;
at least one central control module associated with the semiconductor manufacturing equipment;
wireless modules associated with each of said components and central control module capable of transmitting and receiving wireless signals, wherein said central control module communicates wirelessly with said components via said wireless module to thereby control operation of the components. - View Dependent Claims (10, 11, 12, 13, 14)
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Specification