Dry stripping equipment comprising plasma distribution shower head

• US 20060151115A1
• Filed: 12/27/2005
• Published: 07/13/2006
• Est. Priority Date: 01/11/2005
• Status: Abandoned Application

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Kim, Hoon-Ho
• Application Number:
  US11/316,879
• Publication Number:
  US 20060151115A1
• Time in Patent Office: Days
• US Class Current: 156/345.340
• CPC Class Codes: G03F 7/427 using plasma means only
• CPC Class Codes: H01J 2237/3342 Resist stripping
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32623 Mechanical discharge control means
• CPC Class Codes: H01J 37/32633 Baffles

Abstract

A plasma distribution device for supplying plasma onto an object in a chamber is provided. The device includes a tube for supplying the plasma into the chamber, and a baffle installed under the tube for controlling flow of the plasma supplied from the tube. The baffle includes an upper shower head and a lower shower head, the upper shower head having a center portion for reflecting the plasma supplied from the tube, and a plurality of holes spaced apart from each other around the center portion for uniformly distributing the plasma.

Claims

1. Dry stripping equipment comprising:

a chamber in which a plasma stripping process is carried out;

a support disposed in the chamber, and on which an object to be processed in the chamber is to be seated;

a tube having an end at which the tube opens into the chamber and through which plasma is introduced into the chamber in a given direction; and

a baffle disposed in the chamber as interposed between the tube and the support,

the baffle including an upper shower head and a lower shower head, the upper shower head comprising a plate having a central portion, an upper surface and a lower surface, the upper surface at the central portion of the plate being disposed directly across from and exposed to said end of the tube in the direction in which plasma is introduced into the chamber, and the plate having a plurality of holes extending from the top surface to the bottom surface thereof and which holes are only present in the plate outside the central portion of the plate and are spaced apart from each other beginning at the periphery of the central portion of the plate, and the upper shower head and the lower shower head extending across the chamber so as to divide the chamber into a first space located between the plate of the upper shower head and the end of the tube, a second space located between the plate of the upper shower head and the lower shower head, and a third space located between the lower shower head and the support, whereby the plasma introduced into the chamber through the tube directly impinges and is reflected from the central portion of the plate in said first space so as to diffuse throughout said first space, is distributed by the plate of the upper shower head into said second space to the lower shower head, and is distributed by the lower shower head into said third space.

2. The dry stripping equipment according to claim 1, wherein the plate of the upper shower head and the lower shower head each have an outer coating of sapphire.

3. Dry stripping equipment comprising:

a chamber in which a plasma stripping process is carried out;

a support disposed in the chamber, and on which an object to be processed in the chamber is to be seated;

a tube having an end at which the tube opens into the chamber and through which plasma is introduced into the chamber in a given direction; and

a baffle disposed in the chamber as interposed between the tube and the support,

the baffle including an upper shower head and a lower shower head, the upper shower head consisting of a plate having a central portion, an upper surface and a lower surface, and the plate having a plurality of holes extending from the top surface to the bottom surface thereof and which holes are only present in the plate outside the central portion of the plate and are spaced apart from each other beginning at the periphery of the central portion of the plate, and the plate and the lower shower head extending across the chamber so as to divide the chamber into a first space located between the plate and the end of the tube, a second located between the plate and the lower shower head, and a third space located between the lower shower head and the support, and the entire upper surface of the plate being exposed to said first space with the central portion of the plate at said upper surface thereof being disposed directly across from said end of the tube in the direction in which plasma is introduced into the chamber, whereby the plasma introduced into the chamber through the tube directly impinges and is reflected from the central portion of the plate in said first space so as to diffuse throughout said first space, is distributed through all of the holes in the plate to the lower shower head, and is distributed by the lower shower head into said third space.

4. The dry stripping equipment according to claim 3, wherein the plate and the lower shower head each have an outer coating of sapphire.