Wireless substrate-like sensor
First Claim
1. A wireless substrate-like sensor assembly used to perform calibration of a semiconductor processing system, the sensor assembly comprising:
- a wireless substrate-like sensor including;
a processor;
an internal power source; and
an image acquisition system;
an automatic calibration target including;
at least four target indicia, wherein the at least four target indicia are related to one another through a known relationship; and
wherein the automatic calibration target is mountable to at least one station of the system; and
wherein the sensor is adapted to provide location information relative to at least one automatic calibration target in at least two degrees of freedom.
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Abstract
A wireless substrate-like sensor is provided to facilitate alignment and calibration of semiconductor processing systems. The wireless substrate-like sensor includes an optical image acquisition system that acquires one or more images of targets placed within the semiconductor processing system. Analysis of images of the targets obtained by the wireless substrate-like sensor provides position and/or orientation information in at least three degrees of freedom. An additional target is affixed to a known location within the semiconductor processing system such that imaging the reference position with the wireless substrate-like sensor allows the measurement and compensation for pick-up errors.
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Citations
21 Claims
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1. A wireless substrate-like sensor assembly used to perform calibration of a semiconductor processing system, the sensor assembly comprising:
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a wireless substrate-like sensor including;
a processor;
an internal power source; and
an image acquisition system;
an automatic calibration target including;
at least four target indicia, wherein the at least four target indicia are related to one another through a known relationship; and
wherein the automatic calibration target is mountable to at least one station of the system; and
wherein the sensor is adapted to provide location information relative to at least one automatic calibration target in at least two degrees of freedom. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification