Curved slit valve door with flexible coupling

• US 20060151735A1
• Filed: 01/06/2006
• Published: 07/13/2006
• Est. Priority Date: 06/14/2004
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Lee, Jae-Chull, Berkstresser, David
• Granted Patent: US 7,497,414 B2
• Time in Patent Office: Days
• US Class Current: 251/195
• CPC Class Codes: F16K 1/2007 specially adapted operating means therefor operating means per se F16K31/00
• CPC Class Codes: F16K 1/2021 with a plurality of valve members
• CPC Class Codes: F16K 1/2028 Details of bearings for the axis of rotation
• CPC Class Codes: F16K 1/205 the sealing being arranged on the valve member
• CPC Class Codes: F16K 1/2078 Sealing means for the axis of rotation
• CPC Class Codes: F16K 1/24 with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber

Abstract

Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In one embodiment, an apparatus for sealing a substrate transfer passage in a chamber includes an elongated door member having a concave sealing face coupled to an actuator by a flexible coupling. The flexible coupling configured to allow movement of the door member relative to the lever arm in at least two-planes.

Claims

1. A chamber comprising:

a chamber body having a first substrate transfer port;

a door member having a curved sealing force positionable to selectively seal the first substrate transfer port;

a lever arm;

a flexible coupling connecting the lever arm to the slit valve door, the flexible coupling configured to allow lateral movement of the door relative the lever arm.

2. The chamber of claim 1, wherein the flexible coupling further comprises:

at least a first resilient bushing; and

a linking member passing through the first bushing, door member and the lever arm.

3. The chamber of claim 2, wherein the flexible coupling further comprises:

a second resilient bushing having the linking member disposed therethrough, the first and second resilient bushing separated by the lever arm.

4. The chamber of claim 3, wherein the flexible coupling further comprises:

a third resilient bushing having the linking member disposed therethrough and positioned adjacent the second resilient bushing.

5. The chamber of claim 4, wherein the second resilient bushing and the third second resilient bushing are separated by a spacer.

6. The chamber of claim 1, wherein the flexible coupling further comprises:

a bolt passing through a first hole formed through an end of the door member and a second hole formed through the lever arm;

a first resilient bushing disposed around the bolt and separated by the door member from the lever arm; and

a second resilient bushing disposed around the bolt and separated by the lever arm from the member.

7. The chamber of claim 6 further comprising:

a spacer disposed between the lever arm and the door member.

8. The chamber of claim 6, wherein the lever arm further comprises

a recess formed therein, the second resilient bushing disposed in the recess.

9. The chamber of claim 1, wherein the flexible coupling further comprises:

a linking member coupling the door member and the lever arm in a manner that allows motion of the door member relative to the lever arm in two planes.

10. The load lock chamber of claim 1 further comprising:

a shaft disposed through the chamber body and coupled to the lever arm;

an actuator operably coupled to the shaft.

11. The chamber of claim 1, wherein the lever arm further comprises:

a first end coupled to a first shaft disposed through the chamber body; and

a second end coupled to a first end of the door member by the flexible coupling.

12. The chamber of claim 11 further comprising:

a second flexible coupling; and

a second lever arm having a first end coupled to a second shaft disposed through the chamber body, and a second end coupled to a second end of the slit valve door member by the second flexible coupling.

13. The chamber of claim 1, wherein the chamber body further comprises:

a plurality of stacked single substrate transfer chambers.

14. A chamber suitable for use in substrate vacuum processing system, the chamber comprising:

a chamber body having at least a first substrate transfer port;

a slit valve door having a curved sealing force positionable to selectively seal the substrate transfer port;

a lever arm; and

a flexible coupling connecting the lever arm to the slit valve door, the flexible coupling configured to allow rotation of the door relative the lever arm about two axes.

15. The chamber of claim 14, wherein the chamber is one of a chemical vapor deposition chamber, a load lock chamber, a metrology chamber, a thermal processing chamber, or a physical vapor disposition chamber, a load lock chamber, a substrate transfer chamber or a vacuum chamber.

16. The chamber of claim 14, wherein the flexible coupling further comprises:

a linking member coupling the slit valve door and the lever arm in a manner that allows lateral movement of the door member relative to the lever arm.

17. A load lock chamber comprising:

a chamber body having a first substrate transfer port and at least a second substrate transfer port;

a door member having a curved sealing force positionable to selectively seal the first substrate transfer port;

a lever arm; and

a linking member connecting the lever arm to the door member in a manner that allows lateral and rotational motion of the door member relative to the lever arm.

18. The load lock chamber of claim 17 further comprising:

a plurality of resilient bushings having the linking member disposed therethrough.

19. The load lock chamber of claim 17, wherein at least one of the resilient bushings further comprises:

a polymer.

20. The load lock chamber of claim 17, wherein at least one of the resilient bushings further comprises:

a spring form.