Semiconductor device and method of fabricating the same
First Claim
1. A display device comprising:
- a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end, wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 0.8<
L2/L1<
3.
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Accused Products
Abstract
There is provided a high quality liquid crystal panel having a thickness with high accuracy, which is designed, without using a particulate spacer, within a free range in accordance with characteristics of a used liquid crystal and a driving method, and is also provided a method of fabricating the same. The shape of a spacer for keeping a substrate interval constant is made such that it is a columnar shape, a radius R of curvature is 2 μm or less, a height H is 0.5 μm to 10 μm, a diameter is 20 μm or less, and an angle α is 65° to 115°. By doing so, it is possible to prevent the lowering of an opening rate and the lowering of light leakage due to orientation disturbance.
102 Citations
60 Claims
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1. A display device comprising:
-
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end, wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 0.8<
L2/L1<
3. - View Dependent Claims (2, 3, 4, 5)
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6. A display device comprising:
-
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end, wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 0.8<
L2/L1<
3, andwherein an angle between a tangent plane at a center portion and a surface of the second substrate is 65°
to 115°
. - View Dependent Claims (7, 8, 9, 10)
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11. A display device comprising:
-
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end, wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 0.8<
L2/L1<
3, andwherein a height of the spacer is 0.5 μ
m to 110 μ
m. - View Dependent Claims (12, 13, 14, 15)
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16. A display device comprising:
-
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end, wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 0.8<
L2/L1<
3, andwherein a radius of curvature of an edge between a upper surface and a side surface of each of the plurality of spacers is 21 μ
m or less. - View Dependent Claims (17, 18, 19, 20)
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21. A display device comprising:
-
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end, wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 0.8<
L2/L1<
3, andwherein each of the plurality of spacer comprises resin material. - View Dependent Claims (22, 23, 24, 25)
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26. A display device comprising:
-
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a plurality of spacers over the interlayer insulating film;
a first alignment film on the plurality of spacers and over the interlayer insulating film;
a second substrate;
a second alignment film over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the first substrate, and a center portion between the first end and the second end, wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 0.8<
L2/L1<
3. - View Dependent Claims (27, 28, 29, 30)
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31. A display device comprising:
-
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end, wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 1<
L2/L1<
1.1. - View Dependent Claims (32, 33, 34, 35)
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36. A display device comprising:
-
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end, wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 1<
L2/L2<
1.1, andwherein an angle between a tangent plane at a center portion and a surface of the second substrate is 65°
to 115°
. - View Dependent Claims (37, 38, 39, 40)
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41. A display device comprising:
-
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end, wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 1<
L2/L1<
1.1, andwherein a height of the spacer is 0.5 μ
m to 110 μ
m. - View Dependent Claims (42, 43, 44, 45)
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46. A display device comprising:
-
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end, wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 1<
L2/L1<
1.1, andwherein a radius of curvature of an edge between a upper surface and a side surface of each of the plurality of spacers is 2 μ
m or less. - View Dependent Claims (47, 48, 49, 50)
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51. A display device comprising:
-
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end, wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 1<
L2/L1<
1.1, andwherein each of the plurality of spacer comprises resin material. - View Dependent Claims (52, 53, 54, 55)
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56. A display device comprising:
-
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a plurality of spacers over the interlayer insulating film;
a first alignment film on the plurality of spacers and over the interlayer insulating film;
a second substrate;
a second alignment film over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the first substrate, and a center portion between the first end and the second end, wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 1<
L2/L1<
1.1. - View Dependent Claims (57, 58, 59, 60)
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Specification