Yokeless hidden hinge digital micromirror device
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Accused Products
Abstract
A micromirror array 110 fabricated on a semiconductor substrate 11. The array 110 is comprised of three operating layers 12, 13, 14. An addressing layer 12 is fabricated on the substrate. A hinge layer 13 is spaced above the addressing layer 12 by an air gap. A mirror layer 14 is spaced over the hinge layer 13 by a second air gap. The hinge layer 13 has a hinge 13a under and attached to the mirror 14a, the hinge 13a permitting the mirror 14a to tilt. The hinge layer 13 further has spring tips 13c under the mirror 14a, which are attached to the addressing layer 12. These spring tips 13c provide a stationary landing surface for the mirror 14a.
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Citations
41 Claims
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1-23. -23. (canceled)
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24. A micromechanical device comprising:
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a substrate;
a deflectable member disposed apart from the substrate and operable to deflect relative to said substrate about an axis;
an intermediate layer disposed apart from said substrate and said deflectable member, said intermediate layer having at least one electrode and at least one deformable member having a contact point, said contact point of said deformable member operable to contact said deflectable member upon said deflection of said deflectable number; and
wherein said electrode is located closer than said contact point to a projection of said axis onto the plane of the intermediate layer than said deformable member. - View Dependent Claims (25, 26, 27, 28, 29)
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30. A method of forming a micromirror device, the method comprising:
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providing a substrate;
forming an intermediate layer disposed apart from said substrate forming a deflectable member disposed apart from the intermediate layer and said substrate and operable to deflect relative to said substrate about an axis;
wherein forming an intermediate layer comprises forming said intermediate layer having at least one electrode and at least one deformable member having a contact point, said contact point of said deformable member operable to contact said deflectable member upon said deflection of said deflectable number; and
wherein said electrode is formed closer than said contact point to a projection of said axis onto the plane of the intermediate layer than said deformable member. - View Dependent Claims (31, 32, 33, 34, 35)
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36. A
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37. A display system comprising:
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a micromirror device comprising;
a substrate;
a deflectable member disposed apart from the substrate and operable to deflect relative to said substrate about an axis;
an intermediate layer disposed apart from said substrate and said deflectable member, said intermediate layer having at least one electrode and at least one deformable member having a contact point, said contact point of said deformable member operable to contact said deflectable member upon said deflection of said deflectable number; and
wherein said electrode is located closer than said contact point to a projection of said axis onto the plane of the intermediate layer than said deformable member;
a light source for providing a beam of light to illuminate said micromirror device, said micromirror device spatially modulating said beam of light such that said modulated beam of light forms an image on an image plane. - View Dependent Claims (38, 39, 40, 41)
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Specification