Programmable micromirror motion control system
First Claim
1. A programmable micromirror motion control system comprising:
- a. at least one stepper plate, configured to be rotated to uphold micromirror structure, wherein the stepper plate has at least two contact points with different heights to make the stepper plate to have a motion of rotation. b. a bottom layer configured to have at least one electrode to control the stepper plate; and
c. a micromirror.
3 Assignments
0 Petitions
Accused Products
Abstract
A multi-motion programmable micromirror control method is provided with the multiple supports in a stepper plate to upholding the micromirror structure. The control system has advantages such that multiple motion can be applied to a micromirror and that the micromirror can be controlled in a low driving voltage and that simple motion control is applied by digital controlling and that the degrees of freedom in motion of the micromirror can be chosen by the number of the stepper plate and that only single voltage is needed for driving the micromirror motion. With many advantages, the multi-motion programmable micromirror control system provides a solution to overcome the difficulties in controlling micromirror motion.
-
Citations
45 Claims
-
1. A programmable micromirror motion control system comprising:
-
a. at least one stepper plate, configured to be rotated to uphold micromirror structure, wherein the stepper plate has at least two contact points with different heights to make the stepper plate to have a motion of rotation. b. a bottom layer configured to have at least one electrode to control the stepper plate; and
c. a micromirror. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45)
-
Specification