Method and structure for reducing parasitic influences of deflection devices on spatial light modulators
First Claim
1. A spatial light modulator comprising:
- a first substrate, the first substrate comprising a plurality of electrodes adapted to receive control signals;
a bias grid coupled to the first substrate and electrically isolated from the plurality of electrodes;
a mirror plate electrically coupled to the bias grid, and adapted to rotate from a first orientation to a second orientation in response to the control signals received by the plurality of electrodes;
a landing post support structure coupled to the first substrate and electrically coupled to the bias grid; and
a landing post coupled to the landing post support structure, electrically coupled to the bias grid, and adapted to make contact with the mirror plate positioned at the first orientation.
1 Assignment
0 Petitions
Accused Products
Abstract
A spatial light modulator is provided. The spatial light modulator includes a first substrate, the first substrate comprising a plurality of electrodes adapted to receive control signals, and a bias grid coupled to the first substrate and electrically isolated from the plurality of electrodes. The spatial light modulator also includes a mirror plate electrically coupled to the bias grid and adapted to rotate from a first orientation to a second orientation in response to the control signals received by the plurality of electrodes. The spatial light modulator further includes a landing post support structure coupled to the first substrate and electrically coupled to the bias grid and a landing post coupled to the landing post support structure. The landing post is electrically coupled to the bias grid and adapted to make contact with the mirror plate positioned at the first orientation.
-
Citations
22 Claims
-
1. A spatial light modulator comprising:
-
a first substrate, the first substrate comprising a plurality of electrodes adapted to receive control signals;
a bias grid coupled to the first substrate and electrically isolated from the plurality of electrodes;
a mirror plate electrically coupled to the bias grid, and adapted to rotate from a first orientation to a second orientation in response to the control signals received by the plurality of electrodes;
a landing post support structure coupled to the first substrate and electrically coupled to the bias grid; and
a landing post coupled to the landing post support structure, electrically coupled to the bias grid, and adapted to make contact with the mirror plate positioned at the first orientation. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A spatial light modulator adapted to reflect incident light, the spatial light modulator comprising:
-
a control substrate having a plurality of electrodes coupled to the control substrate and adapted to receive control signals;
a mirror plate adapted to tilt in a first plane in response to the control signals;
a plurality of landing post support structures coupled to the control substrate and spatially arranged in a two-dimensional pattern as an array; and
a plurality of landing posts coupled to the landing post support structures and adapted to arrest the motion of the mirror plate. - View Dependent Claims (9, 10, 11, 12, 13)
-
-
14. A method of fabricating contact structures for use in a spatial light modulator, the method comprising:
-
providing a first substrate having a device surface and a backside surface;
depositing a first layer on the device surface, the first layer having an upper surface opposite the device surface;
patterning the first layer to define a plurality of contact structure openings passing through the first layer from the upper surface to the first substrate;
depositing a conductive layer on the upper surface of the first layer;
performing a chemical mechanical polishing step to reduce the thickness of the conductive layer;
removing at least a portion of the first layer to expose a plurality of contact structures;
joining a second substrate to the device surface of the first substrate to form a bonded substrate structure; and
forming a mirror structure in at least one layer of the bonded substrate structure. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22)
-
Specification