Integrated apparatus of substrate treatment for manufacturing of color filters by inkjet printing systems

• US 20060156975A1
• Filed: 07/13/2005
• Published: 07/20/2006
• Est. Priority Date: 01/18/2005
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Shang, Quanyuan, White, John M., Sze, Fan Cheung
• Application Number:
  US11/180,364
• Publication Number:
  US 20060156975A1
• Time in Patent Office: Days
• US Class Current: 118/300
• CPC Class Codes: G02F 1/133512 Light shielding layers, e.g. black matrix G02F1/136209 takes precedence
• CPC Class Codes: G02F 1/133516 Methods for their manufacture, e.g. printing, electro-deposition or photolithography

Abstract

Embodiments of the invention describe an apparatus and a method for treating a substrate of flat panel display is provided. In one embodiment, an inkjet printing system for a substrate of flat panel display comprises a chemical compound application assembly that applies chemical compound(s) on the substrate of flat panel display, a stage that supports the substrate of flat panel display and a stage positioning system that moves the stage, and an inkjet printing module that dispenses inkjet on the substrate of flat panel display. In another embodiment, a processing system for a substrate of flat panel display comprises a chemical compound application assembly that applies chemical compound(s) on the substrate of flat panel display wherein the chemical compound application assembly has a chemical compound applicator whose width substantially spans the width of the substrate of flat panel display, and a stage that supports the substrate of flat panel display and a stage positioning system that moves the stage. In another embodiment, a method of processing a substrate of flat panel display comprises depositing a layer comprising a chemical compound on the surface of a substrate of flat panel display by a chemical compound application assembly, whose width spans substantially the width of the substrate of flat panel display, of a processing system, and then inkjetting at least three colors on the substrate of flat panel display by an inkjet printing module of the processing system.

Claims

1. An inkjet printing system for a substrate of flat panel display, comprising:

a chemical compound application assembly that applies chemical compound(s) on the substrate of flat panel display;

a stage that supports the substrate of flat panel display and a stage positioning system that moves the stage; and

an inkjet printing module that dispenses inkjet on the substrate of flat panel display.

2. The inkjet printing system of claim 1, wherein the chemical compound application assembly can move across the surface of the substrate of flat panel display.

3. The inkjet printing system of claim 1, wherein the chemical compound application assembly comprises a chemical compound applicator whose width substantially spans the width of the substrate of flat panel display.

4. The inkjet printing system of claim 1, wherein the chemical compound application assembly comprises a chemical compound applicator whose width spans less than the width of the substrate of flat panel display.

5. The inkjet printing system of claim 1, wherein the chemical compound application assembly comprises a vaporizer that vaporize a liquid chemical compound, wherein the vaporized chemical compound is mixed with a carrier gas downstream from the vaporizer to be carried the chemical applicator by a vapor supply line and the chemical applicator and the vapor supply line both have heating devices to keep the vaporized chemical compound in vapor form.

6. A processing system for a substrate of flat panel display, comprising:

a chemical compound application assembly that applies chemical compound(s) on the substrate of flat panel display wherein the chemical compound application assembly has a chemical compound applicator whose width substantially spans the width of the substrate of flat panel display; and

a stage that supports the substrate of flat panel display and a stage positioning system that moves the stage.

7. The processing system of claim 6, wherein the chemical compound application assembly is stationary.

8. The processing system of claim 6, wherein the chemical application assembly can move across the surface of the substrate of flat panel display.

9. The processing system of claim 6, further comprises an inkjet printing module that dispenses inkjet on the substrate of flat panel display wherein the inkjet printing module has at least three inkjet heads whose axes are placed substantially along one line, and the axis of the chemical compound applicator is parallel to the line.

10. The processing system of claim 6, further comprises an inkjet printing module that dispenses inkjet on the substrate of flat panel display wherein the inkjet printing module has at least three inkjet heads whose axes are placed substantially along one line, and the axis of the chemical compound applicator is perpendicular to the line.

11. A processing system for a substrate of flat panel display, comprising:

a chemical compound application assembly that applies chemical compound(s) on the substrate of flat panel display through a chemical compound applicator of the chemical compound application assembly.

12. The processing system of claim 11, wherein the chemical compound applicator comprises a chamber that applies chemical compound(s) on the substrate of flat panel display and at least one exhaust chamber which pumps the exhaust from the chemical compound applicator away from the surface of the substrate of flat panel display.

13. The processing system of claim 11, wherein the width of the chemical compound applicator substantially spans the width of the substrate of flat panel display.

14. The processing system of claim 13, wherein the chemical compound application assembly further comprises a vaporizer that vaporize liquid chemical compound, wherein the vaporized chemical compound is mixed with a carrier gas and be supplied to the chemical compound applicator a chemical compound supply line.

15. The processing system of claim 14, wherein the chemical compound supply line and the chemical compound applicator both have heating devices to keep the chemical compound in vapor form.

16. A method of processing a substrate of flat panel display, comprising:

depositing a layer comprising a chemical compound on the surface of a substrate of flat panel display by a chemical compound application assembly, whose width spans substantially the width of the substrate of flat panel display, of a processing system; and

then

inkjetting at least three colors on the substrate of flat panel display by an inkjet printing module of the processing system.

17. The method of claim 16, wherein the chemical compound, which is in liquid form at room temperature, is vaporized by a vaporizer of the chemical compound application assembly and is supplied to a heated chemical compound applicator of the chemical compound application assembly by a heated supply line of the chemical compound application assembly before the chemical compound is deposited on the substrate of flat panel display.

18. The method of claim 16, wherein the heated chemical compound applicator and the heated supply line maintain the chemical compound in vapor form.

19. The method of claim 16, wherein the chemical compound is mixed with a carrier gas after it is vaporized by the vaporizer.

20. The method of claim 17, wherein depositing the layer comprising the chemical compound is accomplished by moving the substrate of flat panel display under the chemical compound applicator.

21. The method of claim 17, wherein depositing the layer comprising the chemical compound is accomplished by moving the chemical compound applicator across the surface of the substrate of flat panel display.

22. The method of claim 17, wherein depositing the layer comprising the chemical compound is accomplished by moving the substrate of flat panel display under the chemical compound applicator multiple times.

23. The method of claim 17, wherein depositing the layer comprising the chemical compound is accomplished by moving the chemical compound applicator across the surface of the substrate of flat panel display multiple times.

24. The method of claim 16, wherein the substrate of flat panel display has a black matrix on the surface prior to depositing the layer of chemical compound.

25. The method of claim 24, wherein the chemical compound is a surface active compound to increase or decrease the ink-phobicity or ink-philicity of at least one member selected from the group consisting of the black matrix and an outer surface of the substrate of flat panel display that is not covered by the black matrix prior to delivery of an ink within sub-pixel wells of the black matrix.

26. The method of claim 25, wherein the surface is either a fluoroalkyl polyoxyethylene polymer or a polydimethylsiloxane.