Miniature Silicon Condenser Microphone and Method for Producing the Same
First Claim
Patent Images
1. A package for containing a transducer comprising:
- a substrate including a surface having an aperture formed therein, the transducer unit attached to the surface of the substrate adjacent the aperture;
a cover secured to the substrate defining a volume, the transducer unit being disposed within; and
the cover being optionally formed to include an aperture, the aperture being coupled to the volume.
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Abstract
A silicon condenser microphone package includes a transducer unit, a substrate, and a cover. The substrate includes an upper surface transducer unit is attached to the upper surface of the substrate and overlaps at least a portion of the recess wherein a back volume of the transducer unit is formed between the transducer unit and the substrate. The cover is placed over the transducer unit and either the cover or the substrate includes an aperture.
162 Citations
22 Claims
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1. A package for containing a transducer comprising:
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a substrate including a surface having an aperture formed therein, the transducer unit attached to the surface of the substrate adjacent the aperture;
a cover secured to the substrate defining a volume, the transducer unit being disposed within; and
the cover being optionally formed to include an aperture, the aperture being coupled to the volume. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification