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Electrostatic chuck device

  • US 20060158823A1
  • Filed: 03/09/2006
  • Published: 07/20/2006
  • Est. Priority Date: 06/18/2002
  • Status: Abandoned Application
First Claim
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1. A unipolar type electrostatic chuck device for fixing a substrate, said electrostatic chuck device comprising:

  • a metal electrode having a plurality of embossed projections on its top surface, dielectric layers formed only on top surfaces of said plurality of embossed projections, an insulator covering said metal electrode except at the top surface of said metal electrode, and a DC power source connected to said metal electrode.

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