Class E amplifier with inductive clamp
First Claim
1. A power supply circuit for supplying alternating power to a load, comprising:
- a source of direct current (DC) voltage;
a class E amplifier, the class E amplifier receiving the DC input voltage and generating an alternating current (AC) output signal;
a first harmonic filter at the output of the amplifier, the first harmonic filter filtering out predetermined harmonic components of the AC signal to generate a filtered AC signal; and
an output circuit at the output of the first harmonic filter for receiving the filtered AC signal and feeding the filtered AC signal to a load, wherein the output circuit includes a rectifier connected relative to a point in the output circuit such that if the voltage at the point exceeds a predetermined threshold, the rectifier conducts to cause at least one of voltage and current to return to the source of DC voltage and clamps the point to a predetermined voltage.
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Accused Products
Abstract
A power supply including an inverter receiving a DC input signal from a DC input source (11). The inverter is implemented as a single-ended inverter. Each inverter is driven by a signal source (13A, 13B), which outputs an AC signal. The output from each inverter is input to a first stage harmonic filter. The power supply includes an output circuit that includes a rectifier (D1) arranged about a point so that if the inverter attempts to drive the point beyond a predetermined voltage, the rectifier conducts in order to return at least one of power and current to the DC input source. The output from the first harmonic filter (L1A, C1; L1B, C1) is output to a second harmonic filter (L2, C2) and is then output from the power supply.
103 Citations
33 Claims
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1. A power supply circuit for supplying alternating power to a load, comprising:
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a source of direct current (DC) voltage;
a class E amplifier, the class E amplifier receiving the DC input voltage and generating an alternating current (AC) output signal;
a first harmonic filter at the output of the amplifier, the first harmonic filter filtering out predetermined harmonic components of the AC signal to generate a filtered AC signal; and
an output circuit at the output of the first harmonic filter for receiving the filtered AC signal and feeding the filtered AC signal to a load, wherein the output circuit includes a rectifier connected relative to a point in the output circuit such that if the voltage at the point exceeds a predetermined threshold, the rectifier conducts to cause at least one of voltage and current to return to the source of DC voltage and clamps the point to a predetermined voltage. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A power supply circuit for supplying alternating power to a load, comprising:
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a source of direct current (DC) voltage;
a pair of class E amplifiers for receiving the DC input voltage and for generating an alternating current (AC) output signal, the class E amplifiers being arranged in a push-pull configuration;
a first harmonic filter at the output of each amplifier, the first harmonic filter filtering out predetermined harmonic components of the AC signal to generate a filtered AC signal; and
an output circuit at the output of each first harmonic filter for receiving the filtered AC signal and feeding the filtered AC signal to a load, wherein the output circuit includes a rectifier connected relative to a point in the output circuit such that if the voltage at the point exceeds a predetermined threshold, the rectifier conducts to cause at least one of voltage and current to return to the source of DC voltage and clamps the point to a predetermined voltage. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A power supply circuit for supplying alternating power to a load, comprising:
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a source of direct current (DC) voltage;
a pair of class E amplifiers arranged in parallel for receiving the DC input voltage and for generating an alternating current (AC) output signal;
a first harmonic filter at the output of the amplifiers, the first harmonic filter filtering out predetermined harmonic components of the AC signal to generate a filtered AC signal; and
an output circuit at the output of each first harmonic filter for receiving the filtered AC signal and feeding the filtered AC signal to a load, wherein the output circuit includes a rectifier connected relative to a point in the output circuit such that if the voltage at the point exceeds a predetermined threshold, the rectifier conducts to cause at least one of voltage and current to return to the source of DC voltage and clamps the point to a predetermined voltage. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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32. A plasma control system comprising:
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a plasma chamber excited by a radio frequency (RF) signal;
a plasma controller for measuring operating conditions of the plasma chamber and generating control signals for varying conditions within the plasma chamber; and
a RF generator for generating an RF signal to the plasma chamber, the RF generator including;
a RF controller, the RF controller receiving the control signal from the plasma controller and generating a power supply control signal, and a power supply for receiving the power supply control signal and generating a RF signal in accordance with the power supply control signal, the power supply including;
a source of direct current (DC) voltage;
a class E amplifier, the class E amplifier receiving the DC input voltage and generating an alternating current (AC) output signal; and
a first harmonic filter at the output of the amplifier, the first harmonic filter filtering out predetermined harmonic components of the AC signal to generate a filtered AC signal;
wherein the power supply includes a protection circuit including a rectifier connected relative to a predetermined point such that such that if the voltage at the point exceeds a predetermined threshold, the rectifier conducts to clamp the voltage at the point to a predetermined voltage. - View Dependent Claims (33)
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Specification