Memory device and method for fabricating the same
First Claim
1. A method for fabricating a memory device, comprising the steps of:
- etching a portion of a substrate to form a trench;
forming a plurality of gate structures such that one portion of each of the gate structures is disposed within the trench;
performing an ion-implantation process with use of the gate structures as a mask to thereby form a first contact junction beneath the trench and form a plurality of second contact junctions outside the trench; and
forming a first contact plug on the first contact junction and a plurality of second contact plugs on the respective contact junctions.
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Accused Products
Abstract
Disclosed are a memory device and a method for fabricating the same. The memory device includes: a substrate provided with a trench; a bit line contact junction formed beneath the trench; a plurality of storage node contact junctions formed outside the trench; and a plurality of gate structures each being formed on the substrate disposed between the bit line contact junction and one of the storage node contact junctions. Each sidewall of the trench becomes a part of the individual channels and thus, channel lengths of the transistors in the cell region become elongated. Accordingly, the storage node contact junctions have a decreased level of leakage currents, thereby increasing data retention time.
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Citations
7 Claims
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1. A method for fabricating a memory device, comprising the steps of:
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etching a portion of a substrate to form a trench;
forming a plurality of gate structures such that one portion of each of the gate structures is disposed within the trench;
performing an ion-implantation process with use of the gate structures as a mask to thereby form a first contact junction beneath the trench and form a plurality of second contact junctions outside the trench; and
forming a first contact plug on the first contact junction and a plurality of second contact plugs on the respective contact junctions. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification