Sensor
First Claim
1. A sensor having at least one sensor element formed in a first substrate and at least one optical element formed in a second substrate, the first and second substrates being configured relative to one another such that the second substrate forms a cap over the at least one sensor element, the at least one optical element being configured to guide incident radiation on the cap to the at least one sensor element.
1 Assignment
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Accused Products
Abstract
The invention provides a sensor element formed in a first substrate and at least one optical element formed in a second substrate, the first and second substrates being configured relative to one another such that the second substrate forms a cap over the at least one sensor element, the at least one optical element being configured to guide incident radiation on the cap to the at least one sensor element.
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Citations
21 Claims
- 1. A sensor having at least one sensor element formed in a first substrate and at least one optical element formed in a second substrate, the first and second substrates being configured relative to one another such that the second substrate forms a cap over the at least one sensor element, the at least one optical element being configured to guide incident radiation on the cap to the at least one sensor element.
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15. A sensor array including a plurality of sensors, each of the sensors having a sensor element formed in a first substrate and an optical element formed in a second substrate, the first and second substrates being configured relative to one another such that the second substrate forms a cap over the sensor element, the optical element being configured to guide incident radiation on the cap to the sensing element, the sensor array being configured to define an image plane.
- 16. A discriminatory sensor configured to provide a signal on determination of a predefined three dimensional shape being sensed, the sensor including a first sensor element configured to provide a signal on sensing an object a first distance from the sensor and a second sensor element configured to provide a signal on sensing an object a second distance from the sensor, each of the first and second sensor elements including at least one sensing element formed in a first substrate and at least one optical element formed in a second substrate, the first and second substrates being configured relative to one another such that the second substrate forms a cap over the at least one sensing element, the at least one optical element being configured to guide incident radiation on the cap to the at least one sensing element.
- 19. A gas analyser including at least one sensor element formed in a first substrate and at least one optical element formed in a second substrate, the first and second substrates being configured relative to one another such that the second substrate forms a cap over the at least one sensor element, the at least one optical element being configured to guide incident radiation on the cap to the at least one sensor element, the incident radiation guided having a wavelength indicative of the presence of a specific gas.
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21. A method of forming a sensor, the method including the steps of:
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forming at least one sensor element in a first substrate, forming an optical element in a second substrate, bonding the first and second substrates together such that the second substrates provides a cap over the sensor element and the optical element is configured to guide incident radiation on the cap onto the sensor element.
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Specification