Defect analyzing device for semiconductor integrated circuits, system therefor, and detection method
First Claim
1. A defect analysis apparatus for a semiconductor integrated circuit characterized in that a presence/absence of a defect is detected by irradiating an electromagnetic field from a probe and detecting a power supply current variation.
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Abstract
The present invention aims at performing a semiconductor integrated circuit defect analysis with a simplified analysis apparatus and simplifying a defect analysis work. A defect analysis apparatus for a semiconductor integrated circuit is characterized in that a presence/absence of a defect is detected by irradiating an electromagnetic field from a probe to the semiconductor integrated circuit and detecting an electric characteristic variation such as a power supply current variation in the semiconductor integrated circuit.
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Citations
17 Claims
- 1. A defect analysis apparatus for a semiconductor integrated circuit characterized in that a presence/absence of a defect is detected by irradiating an electromagnetic field from a probe and detecting a power supply current variation.
- 2. A defect analysis apparatus for a semiconductor integrated circuit characterized in that a presence/absence of a defect is detected by irradiating an electromagnetic field from a probe and detecting a voltage variation, an impedance variation or an electric characteristic variation.
- 6. A defect analysis apparatus for a semiconductor integrated circuit characterized in that an electric characteristic variation in the semiconductor integrated circuit is detected by activating an open gate or a gate potential.
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14. A manufacture method for a semiconductor device comprising:
- a design step of designing a wiring pattern of the semiconductor device;
a manufacture step of manufacturing the semiconductor device in accordance with the design information;
an inspection step of inspecting the manufactured semiconductor device or the semiconductor device during manufacture; and
an analysis/evaluation step of analyzing or evaluating the test result, wherein the analysis/evaluation step irradiates an electromagnetic field from a probe to a wiring of the semiconductor device, and detects a defect portion by detecting a power supply current variation, the semiconductor device is manufactured if the defect result clears predetermined conditions, whereas a defect reason is identified in accordance with the analysis result if the defect result does not clear the predetermined conditions, and the defect reason is fed back to manufacture processes.
- a design step of designing a wiring pattern of the semiconductor device;
Specification