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Defect analyzing device for semiconductor integrated circuits, system therefor, and detection method

  • US 20060164115A1
  • Filed: 10/29/2003
  • Published: 07/27/2006
  • Est. Priority Date: 10/29/2002
  • Status: Abandoned Application
First Claim
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1. A defect analysis apparatus for a semiconductor integrated circuit characterized in that a presence/absence of a defect is detected by irradiating an electromagnetic field from a probe and detecting a power supply current variation.

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