Liquid immersion type lens system, projection exposure apparatus, and device fabricating method
First Claim
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1. A liquid immersion type lens system, comprising:
- an optical system main body that has an optical surface at one end along an optical axis, the optical surface contacting a first immersion liquid;
a light transmitting member that has two surfaces, one on each end along the optical axis, is disposed opposing the optical surface of the optical system main body, one of the two surfaces contacting the first immersion liquid, the other of the two Surfaces contacting a second immersion liquid; and
a holding member that detachably supports the light transmitting member so that the one surface opposes the optical surface of the optical system main body.
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Abstract
A liquid immersion type lens system includes: an optical system main body that has an optical surface at one end along an optical axis, the optical surface contacting a first immersion liquid; a light transmitting member that has two surfaces, one on each end along the optical axis, is disposed opposing the optical surface of the optical system main body, one of the two surfaces contacting the first immersion liquid, the other of the two surfaces contacting a second immersion liquid; and a holding member that detachably supports the light transmitting member so that the one surface opposes the optical surface of the optical system main body.
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Citations
33 Claims
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1. A liquid immersion type lens system, comprising:
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an optical system main body that has an optical surface at one end along an optical axis, the optical surface contacting a first immersion liquid;
a light transmitting member that has two surfaces, one on each end along the optical axis, is disposed opposing the optical surface of the optical system main body, one of the two surfaces contacting the first immersion liquid, the other of the two Surfaces contacting a second immersion liquid; and
a holding member that detachably supports the light transmitting member so that the one surface opposes the optical surface of the optical system main body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 32)
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20. A projection exposure apparatus that uses a projection optical system to projection expose a pattern onto a substrate, wherein
the projection optical system includes: -
an optical system main body that has an optical surface at one end along an optical as, the optical surface contacting a first immersion liquid; and
a light transmitting member that has two surfaces, one on each end along the optical axis, is disposed opposing the optical surface of the optical system main body, one of the two surfaces contacting the first immersion liquid, the other of the two surfaces contacting a second immersion liquid. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 33)
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Specification