Attenuated-total-reflection measurement apparatus

• US 20060164633A1
• Filed: 01/23/2006
• Published: 07/27/2006
• Est. Priority Date: 01/25/2005
• Status: Active Grant

• Current Assignee: Jasco Corporation
• Original Assignee: Jasco Corporation
• Inventors: Soga, Noriaki, Koshoubu, Jun
• Granted Patent: US 7,492,460 B2
• Time in Patent Office: Days
• US Class Current: 356/300
• CPC Class Codes: G01J 3/02 Details
• CPC Class Codes: G01J 3/021 using plane or convex mirrors, parallel phase plates, or particular reflectors
• CPC Class Codes: G01N 21/552 Attenuated total reflection

Abstract

An attenuated-total-reflection measurement apparatus 10 of the present invention collects light onto a contact surface between a sample and an ATR prim 14 at an incident angle greater than or equal to a critical angle and measures total-reflection light from the contact surface. The attenuated-total-reflection measurement apparatus 10 comprises: a light-irradiating system 12 for emitting the light which is collected onto the contact surface; a photodetector 18 for detecting the total-reflection light from the contact surface; an aperture 20 for restricting the light which the photodetector 18 detects to only light from a specific measurement site in the contact surface; and a detection-side scanning mirror 22 provided in a light path extending from the ATR prism 14 to the aperture 20. The detection-side scanning mirror 22 is configured to allow the orientation of a reflecting surface thereof to be changed. And the measurement site in the contact surface, which is to be measured with the photodetector 18, is changed by moving the reflecting surface of the detection-side scanning mirror 22 with respect to the total-reflection light from the contact surface, to perform mapping measurement in the contact surface.

Claims

1. An attenuated-total-reflection measurement apparatus for collecting light onto a contact surface between a sample and an ATR prim at an incident angle greater than or equal to a critical angle and for measuring total-reflection light from the contact surface, comprising:

a light-irradiating system for emitting the light which is collected onto the contact surface;

a photodetector system for detecting the total-reflection light from the contact surface;

an aperture for restricting the light which the photodetector system detects to only light from a specific site in the contact surface, to set the specific site as a measurement site; and

a detection-side scanning mirror provided in a light path extending from the ATR prism to the aperture,

wherein the detection-side scanning mirror is configured to allow the orientation of a reflecting surface thereof to be changed, and the measurement site in the contact surface, which is to be measured with the photodetector system, is changed by moving the reflecting surface of the detection-side scanning mirror with respect to the total-reflection light from the contact surface, to perform mapping measurement in the contact surface.

2. An attenuated-total-reflection measurement apparatus according to claim 1, further comprising:

an irradiation-side scanning mirror for guiding the light from the light-irradiating system to the ATR prism,

wherein the irradiation-side scanning mirror is configured to allow the orientation of a reflecting surface thereof to be changed, and the irradiated position on the contact surface is changed by moving the reflecting surface of the irradiation-side scanning mirror with respect to the irradiation light from the light-irradiating system.

3. An attenuated-total-reflection measurement apparatus according to claim 1, further comprising:

a controller for controlling the orientation of the reflecting surface of the detection-side scanning mirror.

4. An attenuated-total-reflection measurement apparatus according to claim 2, further comprising:

a controller for controlling the orientation of the reflecting surface of the detection-side and irradiation-side scanning mirror.

5. An attenuated-total-reflection measurement apparatus according to claim 1, further comprising:

a microscope optical system for collecting light onto the contact surface and for collecting light from the contact surface.

6. An attenuated-total-reflection measurement apparatus according to claim 1, wherein the photodetector system is formed of a single-element detector.

7. An attenuated-total-reflection measurement apparatus according to claim 1, wherein the photodetector system is formed of a one-dimensional multi-element detector.