Coated article including titanium oxycarbide and method of making same
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Accused Products
Abstract
A coated article is provided which includes a layer including titanium oxycarbide. In order to form the coated article, a layer of titanium oxide is deposited on a substrate by sputtering or the like. After sputtering of the layer including titanium oxide, an ion beam source(s) is used to implant at least carbon ions into the titanium oxide. When implanting, the carbon ions have sufficient ion energy so as to knock off oxygen (0) from TiOx molecules so as to enable a substantially continuous layer comprising titanium oxycarbide to form near a surface of the previously sputtered layer.
30 Citations
51 Claims
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1-41. -41. (canceled)
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42. A coated article comprising a coating supported by a glass substrate, the coating comprising:
a layer comprising titanium oxide, and at least carbon atoms implanted in the layer comprising titanium oxide, at least some of the carbon ions being implanted to a depth of at least 25Å
below a surface of the layer comprising titanium oxide, thereby forming a layer comprising titanium oxycarbide.- View Dependent Claims (43, 44, 45, 46, 47, 48, 49)
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50. A coated article comprising a coating supported by a substrate, the coating comprising:
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a sputtered layer comprising a metal oxide, and at least carbon atoms which are ion beam implanted in the sputtered layer comprising the metal oxide, at least some of the carbon ions being implanted to a depth of at least 25Å
below a surface of the sputtered layer, thereby forming a layer comprising an oxycarbide.
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51-54. -54. (canceled)
Specification