Relative pressure sensor having an atmosphere-side damper
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Abstract
A relative pressure sensor comprises two chambers and two separating membranes respectively provided for a process pressure and an ambient pressure. The chambers are separated by a pressure-sensitive element and are filled with a transmission medium. In order to attenuate process-side overload pulses, which act upon the first separating membrane [[(2)]], a hydraulic damper is provided that is placed on the side of the atmosphere between the second separating membrane and the pressure-sensitive element. The pressure-sensitive element is a piezoresistive silicon chip, the transmission medium consists of silicone oil, and the damper is comprised of a filter element made of sintered bronze having 29% porosity and an 11 micrometer pore diameter. The filter element has a length of 8 mm and a diameter of 2 mm.
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Citations
18 Claims
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1-9. -9. (canceled)
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10. A relative pressure sensor for measuring a pressure difference between a process pressure and an ambient pressure, comprising a measuring unit, having:
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a first chamber, which is sealed by a first separating membrane and filled with a transmission medium, said first separating membrane being loadable with the process pressure;
a second chamber, which is sealed by a second separating membrane and filled with a transmission medium, said second separating membrane being loadable with the ambient pressure;
a pressure-sensitive element, which separates said first chamber from said second chamber; and
a damper for damping excess-pressure pulses, wherein said damper is arranged between said pressure-sensitive element and said second separating membrane. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification