Please download the dossier by clicking on the dossier button x
×

MESOVALVE MODULATOR

  • US 20060169326A1
  • Filed: 01/28/2005
  • Published: 08/03/2006
  • Est. Priority Date: 01/28/2005
  • Status: Active Grant
First Claim
Patent Images

1. An electrostatic valve comprising:

  • a first structure having an inlet and outlet;

    diaphragm situated on the first structure to form a first cavity;

    a second structure situated on the diaphragm to form a second cavity;

    a first electrode attached to the diaphragm; and

    a second electrode attached to an inside surface of the second structure; and

    wherein the diaphragm has a closable orifice between the first and second cavities.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×