MESOVALVE MODULATOR
First Claim
1. An electrostatic valve comprising:
- a first structure having an inlet and outlet;
diaphragm situated on the first structure to form a first cavity;
a second structure situated on the diaphragm to form a second cavity;
a first electrode attached to the diaphragm; and
a second electrode attached to an inside surface of the second structure; and
wherein the diaphragm has a closable orifice between the first and second cavities.
1 Assignment
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Accused Products
Abstract
A mesovalve having a diaphragm situated between a first chamber and a second chamber. There may be an inlet and an outlet in the first chamber. The diaphragm may provide an orifice between the first and second chambers. There may be a first electrode on the diaphragm and a second electrode on an inside surface of the second chamber. The diaphragm may have first and second positions, or numerous variable positions. Applying a voltage across the electrodes may electrostatically move the diaphragm to the second position during which the outlet is at least partially opened for fluid communication with the inlet, the orifice is closed and the diaphragm is stopped in the second position by a cushioning fluid pressure in the second cavity to prevent pull-in. Removing the voltage from the electrodes may let the diaphragm return to the first position, open the orifice and close the outlet.
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Citations
40 Claims
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1. An electrostatic valve comprising:
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a first structure having an inlet and outlet;
diaphragm situated on the first structure to form a first cavity;
a second structure situated on the diaphragm to form a second cavity;
a first electrode attached to the diaphragm; and
a second electrode attached to an inside surface of the second structure; and
wherein the diaphragm has a closable orifice between the first and second cavities. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A valve mechanism comprising:
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a body having a diaphragm forming a first chamber and a second chamber; and
a first port and a second port formed in the first chamber; and
wherein;
the diaphragm has a first position that restricts fluid from flowing between the first port and the second port, and a second position that allows fluid to flow between the first port and the second port;
a first electrode secured to the diaphragm; and
a second electrode secured in the second chamber to the body. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A valve device comprising:
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a base structure having an input port and an output port;
a top structure situated on the base structure;
a diaphragm situated between the top structure and the base structure;
a first electrode layer formed on an inner surface of the top structure; and
a second electrode formed on a top surface of the diaphragm; and
wherein;
the diaphragm has a central portion and an outer circumference;
the outer circumference is secured between the top structure and the bottom structure;
a cavity is formed between the inner surface of the top structure and the diaphragm;
the diaphragm in a first position has the central portion on the bottom structure and the second port is closed;
the diaphragm in the second position has the central portion away from the bottom structure and the second port is open resulting in a fluid continuity with the first port; and
a voltage applied to the first and second electrodes may cause the diaphragm to move to the second position. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
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Specification