Vacuum valve

• US 20060169940A1
• Filed: 02/02/2006
• Published: 08/03/2006
• Est. Priority Date: 02/02/2005
• Status: Active Grant

• Current Assignee: VAT Holding AG (VAT Group AG)
• Original Assignee: VAT Holding AG (VAT Group AG)
• Inventors: Mayer, Thomas, Duelli, Bernhard
• Granted Patent: US 7,481,417 B2
• Time in Patent Office: Days
• US Class Current: 251/301
• CPC Class Codes: F16K 41/10 with diaphragm, e.g. shaped as bellows or tube
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

A vacuum valve comprises a conical sealing surface arranged at a valve body, a valve disk at which a conical sealing surface is arranged, and a sealing ring having a first sealing surface and a second sealing surface. The valve disk, the valve body and the sealing ring are made of metal at least in the areas of the sealing surfaces. The valve disk is constructed so as to be curved or angled considered in axial section through the center and encloses an angle of less than 90° with the closing direction in the unloaded state at least in a radial outer portion adjoining the sealing surface. The valve disk has an elasticity such that a displacement of the radial outer edge of the valve disk relative to a point in the center of the valve disk of at least 0.1% of the diameter of the valve disk in direction of the center axis of the valve disk is bought about in the closed position of the valve disk relative to the open position of the valve disk by an elastic deformation of the valve disk.

Claims

1. A vacuum valve comprising:

a valve body at which a conical sealing surface is arranged so as to surround a valve opening;

a valve disk which is rotationally symmetrical with respect to a center axis and at which a conical sealing surface is arranged and which is displaceable between an open position in the open state of the vacuum valve and a closed position in a sealed state of the vacuum valve;

movement of the valve disk when closing the vacuum valve being carried out, at least in a final part of the closing movement before reaching the closed position, in a closing direction extending parallel to the center axis of the valve disk;

a sealing ring having a first sealing surface and a second sealing surface being pressed against the sealing surface of the valve body on one side and against the sealing surface of the valve disk on the other side in the closed position of the valve disk;

said valve disk, said valve body and said sealing ring being made of metal at least in the areas of the sealing surfaces;

said valve disk being constructed so as to be curved or angled considered in an axial section through the center and, in this respect, enclosing an angle of less than 90°

with the closing direction in the unloaded state at least in a radial outer portion adjoining the sealing surface;

said valve disk having an elasticity such that a displacement of the radial outer edge of the valve disk relative to a point in the center of the valve disk of at least 0.1% of the diameter of the valve disk in direction of the center axis of the valve disk being bought about in the closed position of the valve disk relative to the open position of the valve disk by an elastic deformation of the valve disk.

2. The vacuum valve according to claim 1, wherein a displacement of the radial outer edge of the valve disk relative to the point in the center of the valve disk by at least 0.5% of the diameter of the valve disk takes place in the closed position of the valve disk compared to the open position of the valve disk.

3. The vacuum valve according to claim 1, wherein the valve disk encloses an angle (28) with the closing direction (15) in a radial outer area adjacent to the sealing surface, which angle is between 65°

and 87°

in the unloaded state of the valve disk.

4. The vacuum valve according to claim 3, wherein this angle is between 75°

and 85°

.

5. The vacuum valve according to claim 1, wherein one or both side surfaces of the valve disk is/are continuously curved considered in axial section through the center.

6. The vacuum valve according to claim 1, wherein one or both side surfaces of the valve disk is/are V-shaped.

7. The vacuum valve according to claim 1, wherein one or both side surfaces has/have two portions which adjoin one another in radial direction and which are connected to one another by a curved or angled portion.

8. The vacuum valve according to claim 1, wherein the thickness of the valve disk decreases radially outward.

9. The vacuum valve according to claim 8, wherein the thickness of the valve disk decreases continuously radially outward outside of the area in which it is connected to a supporting part.

10. The vacuum valve according to claim 1, wherein the thickness of the valve disk immediately adjacent to the sealing surface is between 1 mm and 4 mm.

11. The vacuum valve according to claim 10, wherein the thickness of the valve disk immediately adjacent to the sealing surface is between 1.5 mm and 2.5 mm.

12. The vacuum valve according to claim 1, wherein the sealing ring is held at the valve disk.

13. The vacuum valve according to claim 12, wherein a holding plate is fastened to the front side of the valve disk remote of the supporting part supporting the valve disk, which holding plate has an angled peripheral web whose end face contacts the sealing ring.

14. The vacuum valve according to claim 1, wherein the sealing surfaces of the sealing ring extend in an arc-shaped manner considered in cross section.

15. The vacuum valve according to claim 1, wherein the sealing ring has a necked-down portion in the area between the two sealing surfaces.

16. The vacuum valve according to claim 15, wherein the necked-down portion is formed by a V-shaped construction of the two side surfaces connecting the sealing surfaces.

17. The vacuum valve according to claim 1, wherein the radial outer edge of the valve disk is displaced relative to the point in the center of the valve disk by at most 3% of the diameter of the valve disk in the closed position of the valve disk compared to the open position of the valve disk by an elastic deformation of the valve disk.

18. The vacuum valve according to claim 17, wherein this displacement of the radial outer edge of the valve disk is at most 2% of the diameter of the valve disk.

19. The vacuum valve according to claim 1, wherein the radial outer portion of the valve disk adjoining the sealing surface encloses an angle of at most 90°

with the closing direction in the closed position of the valve disk.