Method of detecting RF power delivered to a load and complex impedance of the load

• US 20060170367A1
• Filed: 01/11/2006
• Published: 08/03/2006
• Est. Priority Date: 01/11/2005
• Status: Active Grant

• Current Assignee: ASM America Incorporated (ASM International NV)
• Original Assignee: Innovations Engineering Incorporated
• Inventors: Bhutta, Imran Ahmed
• Granted Patent: US 7,298,128 B2
• Time in Patent Office: Days
• US Class Current: 315/111.210
• CPC Class Codes: H01J 37/32174 Circuits specially adapted for controlling the RF discharge
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence

Abstract

Methods and systems of detecting one or more characteristics of a load are disclosed. One or more characteristics of a first signal may be detected at the output of a Radio Frequency (RF) power generator. The first signal may have a fundamental frequency. The one or more characteristics of the first signal may be sampled at a sampling frequency to produce a digital sampled signal. The sampling frequency may be determined based on a function of the fundamental frequency of the first signal. One or more characteristics of a load in communication with the RF power generator may then be determined from the digital sampled signal.

Claims

1. A method of detecting one or more characteristics of a load, the method comprising:

detecting one or more characteristics of a first signal at the output of a Radio Frequency (RF) power generator, wherein the first signal exhibits a fundamental frequency;

sampling the one or more characteristics of the first signal at a sampling frequency to produce a digital sampled signal, wherein the sampling frequency is determined based on a function of the fundamental frequency of the first signal; and

determining one or more characteristics of a load from the digital sampled signal, wherein the load is in communication with the RF power generator.

2. The method of claim 1 wherein the one or more characteristics of the first signal comprise one or more of the following:

a voltage; and

a current.

3. The method of claim 1 wherein the sampling frequency is determined based on a function having the form

$\frac{2^n}{}$

f 0 2 n + 1 ,

wherein n is a non-negative integer and f₀ is the fundamental frequency of the first signal.

4. The method of claim 1 wherein determining one or more characteristics of a load from the digital sampled signal comprises determining one or more characteristics of a load from the digital sampled signal using a digital signal processor.

5. The method of claim 1 wherein the one or more characteristics of a load comprise one or more of the following:

an amplitude of the load voltage at the fundamental frequency;

an amplitude of the load voltage at a harmonic of the fundamental frequency;

an amplitude of the load current at the fundamental frequency;

an amplitude of the load current at a harmonic of the fundamental frequency;

a phase angle between the load voltage and the load current at the fundamental frequency; and

a phase angle between the load voltage and the load current at a harmonic of the fundamental frequency.

6. The method of claim 1 wherein the one or more characteristics of a load comprise one or more of the following:

delivered power to the load at the fundamental frequency;

delivered power to the load at a harmonic of the fundamental frequency;

forward power at the load at the fundamental frequency;

forward power at the load at a harmonic of the fundamental frequency;

reflected power from the load at the fundamental frequency;

reflected power from the load at a harmonic of the fundamental frequency;

a magnitude of the load impedance at the fundamental frequency;

a magnitude of the load impedance at a harmonic of the fundamental frequency;

a complex form for the load impedance at the fundamental frequency; and

a complex form for the load impedance at a harmonic of the fundamental frequency.

7. A system for determining one or more characteristics of a load, the system comprising:

a Radio Frequency (RF) power generator;

a load in communication with the RF power generator;

a detecting device located at the output of the RF power generator;

an analog-to-digital (A-D) converter in communication with the detecting device; and

a digital signal processor (DSP) in communication with the A-D converter,

wherein the detecting device detects one or more characteristics of a first signal, wherein the A-D converter converts the one or more characteristics of the first signal into a digital form, wherein the DSP determines one or more characteristics of the load from the digital form of the one or more characteristics of the first signal.

8. The system of claim 7 wherein the load comprises a plasma chamber.

9. The system of claim 7 wherein the load comprises a gaseous tube.

10. The system of claim 7 wherein the load comprises a resistive load.

11. The system of claim 7 wherein the load comprises one or more reactive components.

12. The system of claim 7 wherein the first signal exhibits a fundamental frequency.

13. The system of claim 12 wherein the A-D converter comprises a sampling device having a sampling frequency having the form

$\frac{2^n}{}$

f 0 2 n + 1 ,

wherein n is a non-negative integer and f₀ is the fundamental frequency.

14. The system of claim 7 wherein the one or more characteristics of a load comprise one or more of the following:

an amplitude of the load voltage at the fundamental frequency;

an amplitude of the load voltage at a harmonic of the fundamental frequency;

an amplitude of the load current at the fundamental frequency;

an amplitude of the load current at a harmonic of the fundamental frequency;

a phase angle between the load voltage and the load current at the fundamental frequency; and

a phase angle between the load voltage and the load current at a harmonic of the fundamental frequency.

15. The system of claim 7 wherein the one or more characteristics of a load comprise one or more of the following:

delivered power to the load at the fundamental frequency;

delivered power to the load at a harmonic of the fundamental frequency;

forward power at the load at the fundamental frequency;

forward power at the load at a harmonic of the fundamental frequency;

reflected power from the load at the fundamental frequency;

reflected power from the load at a harmonic of the fundamental frequency;

a magnitude of the load impedance at the fundamental frequency;

a magnitude of the load impedance at a harmonic of the fundamental frequency;

a complex form for the load impedance at the fundamental frequency; and

a complex form for the load impedance at a harmonic of the fundamental frequency.

16. The system of claim 7, further comprising:

an impedance matching network in communication with the RF power generator and the load.